Disclosed herein are a sheet-like probe for
wafer inspection, by which a good electrically connected state to a
wafer can be surely achieved even when the
pitch of electrodes to be inspected in the
wafer is extremely small, and applications thereof.The sheet-like probe for wafer inspection of the invention has an insulating sheet, in which a plurality of through-holes each extending in a thickness-wise direction of the insulating sheet have been formed in accordance with a pattern corresponding to a pattern of electrodes to be inspected in all or part of integrated circuits formed on a wafer, and
electrode structures arranged in the respective through-holes in the insulating sheet so as to protrude from both surfaces of the insulating sheet. Each of the
electrode structures is formed by linking a front-
surface electrode part exposed to a front surface of the insulating sheet and having a
diameter greater than a front surface-side opening
diameter of the through-hole in the insulating sheet to a back-
surface electrode part exposed to a back surface of the insulating sheet and having a
diameter greater than a back surface-side opening diameter of the through-hole in the insulating sheet through a
short circuit part inserted through into the through-hole in the insulating sheet, and is movable in the thickness-wise direction of the insulating sheet.