199results about "Flow control with auxillary non-electric power" patented technology

The present invention provides a pilot type water discharging / stopping and flow regulating valve capable of performing both the discharging / stopping of water and the regulation of flow by light operations and, once the flow is regulated, discharging the water at a pre-regulated specified flow in the next water discharge even if the water is stopped. The pilot type water discharging / stopping and flow regulating valve (10) comprises a main valve (20), a back pressure chamber (26), an introducing small hole (28), a pilot water channel (30), and a flow regulating mechanism. The flow of the main water channel is regulated by advancing and retreating the main valve (20) following the advancement and retreat of a pilot valve (34). The valve further comprises a water discharging / stopping switching mechanism switching between the discharging and stopping of water by advancing and retreating the pilot valve (34) between a water discharge position and a water stop position. Furthermore, the flow regulating mechanism is formed to maintain the flow regulating position of the pilot valve (34) at a previously regulated flow regulating position when the pilot valve (34) performs the water discharge operation after performing the water stop operation by the water discharging / stopping switching mechanism.

A device for metering and controlling fluid flow includes a variable orifice and is configured to use a pressure sensor. The device includes a fluid flow conduit having at least one planar inner wall that extends along a portion of the fluid flow conduit length, and an element having a linear edge configured to mate with the at least one planar inner wall of the fluid flow conduit. The element is movable in a direction transverse to an axis of the conduit between an open position wherein fluid flows through the conduit and a closed position wherein the element substantially shuts off fluid flow in the conduit.

A flow controller and a test method therefor are provided which enable testing of the flow control of a process gas passing through a fluid path during operation of semiconductor manufacturing apparatuses. While the flow control is being performed to adjust the flow rate through the fluid path to a flow rate set value, a predetermined number of pieces of test sampling information is collected and associated with the flow rate set value for storage. The test sampling information is made up of a detected flow rate value of the process gas, a detected pressure value, and valve drive control information delivered to a flow control valve mechanism. Then, coefficients of association are sequentially determined which indicate the associations of the predetermined number of detected flow rate values and pieces of valve drive control information, which are stored as the test sampling information. When the value of a coefficient of association is out of the range of predetermined threshold values, a difference is determined between the valve drive control information made available based on a newly received detected flow rate value and the reference valve drive control information obtained with reference to a valve property information table pre-registered for testing. This difference is employed as test information.