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948 results about "X-ray fluorescence" patented technology

X-ray fluorescence (XRF) is the emission of characteristic "secondary" (or fluorescent) X-rays from a material that has been excited by being bombarded with high-energy X-rays or gamma rays. The phenomenon is widely used for elemental analysis and chemical analysis, particularly in the investigation of metals, glass, ceramics and building materials, and for research in geochemistry, forensic science, archaeology and art objects such as paintings and murals.

Advanced drug development and manufacturing

X-ray fluorescence (XRF) spectrometry has been used for detecting binding events and measuring binding selectivities between chemicals and receptors. XRF may also be used for estimating the therapeutic index of a chemical, for estimating the binding selectivity of a chemical versus chemical analogs, for measuring post-translational modifications of proteins, and for drug manufacturing.
Owner:RGT UNIV OF CALIFORNIA

Wavelength dispersive XRF system using focusing optic for excitation and a focusing monochromator for collection

X-ray fluorescence (XRF) spectroscopy systems and methods are provided. One system includes a source of x-ray radiation and an excitation optic disposed between the x-ray radiation source and the sample for collecting x-ray radiation from the source and focusing the x-ray radiation to a focal point on the sample to incite at least one analyte in the sample to fluoresce. The system further includes an x-ray fluorescence detector and a collection optic comprising a doubly curved diffracting optic disposed between the sample and the x-ray fluorescence detector for collecting x-ray fluorescence from the focal point on the sample and focusing the fluorescent x-rays towards the x-ray fluorescence detector.
Owner:X-RAY OPTICAL SYSTEM INC

Back-end-of-line metallization inspection and metrology microscopy system and method using x-ray fluorescence

Systems and methods for performing inspection and metrology operations on metallization processes such as on back-end-of-line (BEOL) metallization thickness and step coverage are disclosed. Specific examples include measurements of thickness and uniformity of barrier layers, including tantalum for example, and seed layers, including copper for example, in Damascene, including dual-Damascene, trenches during the interconnect fabrication steps of integrated circuit production. The invention also relates to the detection and measurement of void formation during and after copper electroplating. The invention utilizes x-ray fluorescence to measure the absolute thicknesses and the thickness uniformity of the barrier layers in the trenches, the copper seed layers for electroplating, and the final copper interconnects.
Owner:XRADIA

High Speed Metrology with Numerically Controlled Machines

Systems, apparatuses and methods are described for integrating an electronic metrology sensor with precision production equipment such as computer numerically controlled (CNC) machines. For example, a laser distance measuring sensor is used. Measurements are taken at a relatively high sample rate and converted into a format compatible with other data generated or accepted by the CNC machine. Measurements from the sensor are synchronized with the position of the arm of the machine such as through the use of offsets. Processing yields a detailed and highly accurate three-dimensional map of a workpiece in the machine. Applicable metrology instruments include other near continuously reading non-destructive characterization instruments such as contact and non-contact dimensional, eddy current, ultra-sound, and X-Ray Fluorescence (XRF) sensors. Various uses of measurements include: multiple component matching, correction of machine drift, closed loop control of machines, and verification of product tolerances via substantially complete serialized dimensional quality control.
Owner:GRALE TECH

Instrument and method for X-ray diffraction, fluorescence, and crystal texture analysis without sample preparation

An X-ray diffraction and X-ray fluorescence instrument for analyzing samples having no sample preparation includes a X-ray source configured to output a collimated X-ray beam comprising a continuum spectrum of X-rays to a predetermined coordinate and a photon-counting X-ray imaging spectrometer disposed to receive X-rays output from an unprepared sample disposed at the predetermined coordinate upon exposure of the unprepared sample to the collimated X-ray beam. The X-ray source and the photon-counting X-ray imaging spectrometer are arranged in a reflection geometry relative to the predetermined coordinate.
Owner:UNIV OF MARYLAND BALTIMORE COUNTY

X-ray fluorescence spectrometric system and a program for use therein

An X-ray fluorescence spectrometric system includes a sample pre-treatment apparatus 10 for retaining on a surface of a substrate a substance to be measured that is found on the surface of the substrate, after such substance has been dissolved and subsequently dried, an X-ray fluorescence spectrometer 40, and a transport apparatus 50 for transporting the substrate from the sample pre-treatment apparatus towards the X-ray fluorescence spectrometer, which system as a whole is easy to operate. This spectrometric system also includes a control apparatus 50 for controlling the sample pre-treatment apparatus 10, the X-ray fluorescence spectrometer 40 and the transport apparatus 50 in a totalized fashion.
Owner:RIGAKU CORP

Element-specific X-ray fluorescence microscope and method of operation

An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The preferential imaging of the optical train is achieved using a chromatic lens in a suitably configured imaging system. A zone plate is an example of such a chromatic lens; its focal length is inversely proportional to the X-ray wavelength. Enhancement of preferential imaging of a given element in the test sample can be obtained if the zone plate lens itself is made of a compound containing substantially the same element. For example, when imaging copper using the Cu La spectral line, a copper zone plate lens is used. This enhances the preferential imaging of the zone plate lens because its diffraction efficiency (percent of incident energy diffracted into the focus) changes rapidly near an absorption line and can be made to peak at the X-ray fluorescence line of the element from which it is fabricated. In another embodiment, a spectral filter, such as a multilayer optic or crystal, is used in the optical train to achieve preferential imaging in a fluorescence microscope employing either a chromatic or an achromatic lens.
Owner:CARL ZEISS X RAY MICROSCOPY

Methods for identification and verification using digital equivalent data system

Apparatus and methods in which one or more elemental taggants that are extrinsically placed in an object are detected by x-ray fluorescence analysis to identify or authenticate the object are described. The taggant is manufactured as part of the object or the taggant is placed into a coating, packaging, label, or otherwise embedded onto the object for the purpose of later verifying the presence or absence of these elements by x-ray fluorescence. The taggant is then analyzed by XRF and the analysis is then converted into a 2D symbol format that can be used in various security and authentication applications. By using x-ray fluorescence analysis, the apparatus and methods of the invention are simple and easy to use, without the limitations experience by current anti-counterfeiting technologies.
Owner:NASA +1

Material sorting technology

Systems for sorting materials, such as those made of metal, are described. The systems may operate by irradiating the materials with x-rays and then detecting fluoresced x-rays, transmitted x-rays, or both. Detection of the fluoresced x-rays may be performed using an x-ray fluorescence detector array. The systems may be configured to provide high throughput sorting of small pieces of materials.
Owner:SPECSTREETCARET

X-ray method for the measurement, characterization, and analysis of periodic structures

Periodic spatial patterns of x-ray illumination are used to gather information about periodic objects. The structured illumination may be created using the interaction of a coherent or partially coherent x-ray source with a beam splitting grating to create a Talbot interference pattern with periodic structure. The object having periodic structures to be measured is then placed into the structured illumination, and the ensemble of signals from the multiple illumination spots is analyzed to determine various properties of the object and its structures. Applications to x-ray absorption / transmission, small angle x-ray scattering, x-ray fluorescence, x-ray reflectance, and x-ray diffraction are all possible using the method of the invention.
Owner:SIGRAY INC

Methods for identification and verification using vacuum XRF system

Apparatus and methods in which one or more elemental taggants that are intrinsically located in an object are detected by x-ray fluorescence analysis under vacuum conditions to identify or verify the object's elemental content for elements with lower atomic numbers. By using x-ray fluorescence analysis, the apparatus and methods of the invention are simple and easy to use, as well as provide detection by a non line-of-sight method to establish the origin of objects, as well as their point of manufacture, authenticity, verification, security, and the presence of impurities. The invention is extremely advantageous because it provides the capability to measure lower atomic number elements in the field with a portable instrument.
Owner:NASA +1

X-ray surface analysis and measurement apparatus

This disclosure presents systems for total reflection x-ray fluorescence measurements that have x-ray flux and x-ray flux density several orders of magnitude greater than existing x-ray technologies. These may therefore useful for applications such as trace element detection and / or for total-reflection fluorescence analysis.The higher brightness is achieved in part by using designs for x-ray targets that comprise a number of microstructures of one or more selected x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray brightness and therefore greater x-ray flux.The high brightness / high flux source may then be coupled to an x-ray reflecting optical system, which can focus the high flux x-rays to a spots that can be as small as one micron, leading to high flux density.
Owner:SIGRAY INC

Ionic pre-concentration XRF identification and analysis device, system and method

A device, system and method for detecting and measuring concentrations of elements in fluids comprises: flowing a fluid through a central flow interelectrode gap of an ionic preconcentration cell separating an upper high specific surface area electrode from a lower high specific surface area electrode of the ionic preconcentration cell by a predetermined interelectrode gap width; and applying a voltage differential between the upper high surface area electrode and the lower high surface area electrode while the fluid is flowing through the central flow interelectrode gap. As such, this cell that utilizes its inherent capacitance for double layer formation to extract ultra-trace levels of ionic contaminants from fluids in order to enhance detection by x-ray fluorescence analysis.
Owner:INTERSCI +1

Method Of Determining Reservoir Properties And Quality With Multiple Energy X-Ray Imaging

A method of evaluating a reservoir includes a multi-energy X-ray CT scan of a sample, obtaining bulk density and photoelectric effect index effect for the sample, estimation of at least mineral property using data obtained from at least one of a core gamma scan, a spectral gamma ray scan, an X-ray fluorescence (XRF) analysis, or an X-ray diffraction (XRD) analysis of the sample, and determination of at least one sample property by combining the bulk density, photoelectric effect index, and the at least one mineral property (e.g., total clay content). Reservoir properties, such as one or more of formation brittleness, porosity, organic material content, and permeability, can be determined by the method without need of detailed lab physical measurements or destruction of the sample. A system for evaluating a reservoir also is provided.
Owner:HALLIBURTON ENERGY SERVICES INC

Portable Apparatus for Soil Chemical Characterization

The present invention determines one or more properties of a soil sample by scanning a soil sample using a visible near infrared diffuse reflectance diffuse reflectance (VisNIR) spectroradiometer, scanning the soil sample using a x-ray fluorescence (PXRF) spectrometer, receiving a diffuse reflectance spectra from the VisNIR spectroradiometer and an elemental data from the PXRF spectrometer, determining one or more properties of the soil sample using one or more processors and a predictive model that relates the diffuse reflectance spectra and the elemental data to the one or more properties, and providing the one or more properties of the soil sample to one or more input / output interface.
Owner:TEXAS TECH UNIV SYST +1

Iron alloy fusing sample preparation method for X-ray fluorescence spectrum analysis

The invention relates to an iron alloy fusing sample preparation method for X-ray fluorescence spectrum analysis, belonging to the technical field of materialization detection and aiming to solve the problem that fusing a film production alloy sample can erode a platinum crucible. The method comprises the steps of building up wall of the platinum crucible, preparing an oxidizing agent, pre-oxidizing an iron alloy sample and fusing and preparing sample from the iron alloy sample. The invention provides the fusing sample preparation method suitable for various iron alloys such as ferromanganese, silicomanganese, calcium silicon, ferrosilicon, ferromolybdenum, ferrotitanium, cymrite, ferrochrome, ferrocolumbium, ferrovanadium, silicon silicomanganese and the like. By adopting the method, a glass fusing piece can be manufactured without eroding the valuable platinum crucible, the sample can be completely oxidized in the sample preparation process, the sample preparation time is short, the prepared glass fusing piece is uniform and perfect, and the mineral effect and the granularity effect can be completely eliminated. The invention has safe and reliable method, simple and convenient operation and good repeatability, is suitable for various iron alloy samples and widens the application range of the fluorescence analysis.
Owner:HBIS COMPANY LIMITED HANDAN BRANCH COMPANY

Depth profile metrology using grazing incidence X-ray fluorescence

For small angles that are near critical angle, a primary incident X-ray beam has excellent depth resolution. A series of X-ray fluorescence measurements are performed at varying small angles and analyzed for depth profiling of elements within a substrate. One highly useful application of the X-ray fluorescence measurements is depth profiling of a dopant used in semiconductor manufacturing such as arsenic, phosphorus, and boron. In one example, angles are be varied from 0.01° to 0.20° and measurements made to profile arsenic distribution within a semiconductor wafer. In one embodiment, measurements are acquired using a total reflection X-ray fluorescence (TXRF) type system for both known and unknown profile distribution samples. The fluorescence measurements are denominated in counts / second terms and formed as ratios comparing the known and unknown sample results. The count ratios are compared to ratios of known to unknown samples that are acquired using a control analytical measurement technique. In one example the control technique is secondary ion mass spectroscopy (SIMS) so that the count ratios from the TXRF-type measurements are compared to ratios of integrals of SIMS profiles. In another example, the TXRF-type measurement ratios are compared to simulation profiles of known samples. Integrals of the SIMS profile that vary as a function of depth into the substrate correspond to the grazing incidence angles of the TXRF-like measurement and respective count rates.
Owner:ADVANCED MICRO DEVICES INC

Modeling method of soil heavy metal content detection model and application thereof

The invention discloses a modeling method of a soil heavy metal content detection model and the application thereof. The modeling method includes the steps of collecting a soil sample, collecting the X-ray fluorescence spectrum of the sample, measuring the reference value of heavy metal element content to be measured in the soil sample, and establishing the correcting relation between the X-ray fluorescence spectrum and the reference value of heavy metal element content. The method can simultaneously perform rapid nondestructive examination to various heavy metal element contents of soil, has wide range of application and high universality and provides a technological base for the on-site detection of farmland soil heavy metal pollution.
Owner:北京农产品质量检测与农田环境监测技术研究中心

Adapter and analyzer device for performing X-ray fluorescence analysis on hot surfaces

The measurement head (101) of an X-ray fluorescence analyzer device is protected against heat from a hot target by using an adapter (201). It comprises a sheet of material having low thermal conductivity and has a three-dimensional shape that follows the form of a front part of the measurement head (101). Said sheet of material is attached to said measurement head (101) and has a central part (401) which defines an opening (202) coincident with a radiation window (109) in said measurement head (101). Said attachment means (204, 205, 301, 302, 311, 312) are located at a part of said sheet of material that is distant from said central part (401).
Owner:HITACHI HIGH TECH ANALYTICAL SCI FINLAND OY

Metrology Tool With Combined XRF And SAXS Capabilities

Methods and systems for performing simultaneous X-ray Fluorescence (XRF) and small angle x-ray scattering (SAXS) measurements over a desired inspection area of a specimen are presented. SAXS measurements combined with XRF measurements enables a high throughput metrology tool with increased measurement capabilities. The high energy nature of x-ray radiation penetrates optically opaque thin films, buried structures, high aspect ratio structures, and devices including many thin film layers. SAXS measurements of a particular location of a planar specimen are performed at a number of different out of plane orientations. This increases measurement sensitivity, reduces correlations among parameters, and improves measurement accuracy. In addition, specimen parameter values are resolved with greater accuracy by fitting data sets derived from both SAXS and XRF measurements based on models that share at least one material parameter. The fitting can be performed sequentially or in parallel.
Owner:KLA TENCOR TECH CORP

Multi-technique thin film analysis tool

A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.
Owner:KLA TENCOR CORP

X-ray techniques using structured illumination

ActiveUS20160320320A1Great x-ray fluxEnhanced signalImaging devicesX-ray tube electrodesX Ray Emission SpectroscopySmall-angle X-ray scattering
This invention discloses a method and apparatus for x-ray techniques using structured x-ray illumination for examining material properties of an object. In particular, an object with one or more regions of interest (ROIs) having a particular shape, size, and pattern may be illuminated with an x-ray beam whose cross sectional beam profile corresponds to the shape, size and pattern of the ROIs, so that the x-rays of the beam primarily interact only with the ROIs. This allows a greater x-ray flux to be used, enhancing the signal from the ROI itself, while reducing unwanted signals from regions not in the ROI, improving signal-to-noise ratios and / or measurement throughputThis may be used with a number of x-ray measurement techniques, including x-ray fluorescence (XRF), x-ray diffraction (XRD), small angle x-ray scattering (SAXS), x-ray absorption fine-structure spectroscopy (XAFS), x-ray near edge absorption spectroscopy, and x-ray emission spectroscopy.
Owner:SIGRAY INC

Near-field X-ray fluorescence microprobe

This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to generate x-ray emission. This microprobe can be combined with energy-resolved detector or a fluorescence imaging system for material analysis applications.
Owner:CARL ZEISS X RAY MICROSCOPY
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