61 results about "Time of flight secondary ion mass spectroscopy" patented technology

In plane distribution of a target object contained in a sample is measured. The sample dispersedly placed on a substrate is treated to promote ionization of the target object. Then, the mass and flying amount of an ion containing the target object or a component thereof is determined by irradiating an ion beam to the sample and performing time-of-flight secondary ion mass spectrometry of the ion that flies from a portion in the sample where the ion beam is irradiated, and the in-plane distribution of the target object is determined from the mass and flying amount data obtained at plural portions by scanning the beam on the sample plane. The step of treating the sample to promote ionization of the target object includes contacting an aqueous solution of an acid that does not crystallize at ordinary temperature with the sample. A high spatial resolution two-dimensional image can be obtained.

A time-of-flight secondary ion mass spectrometer comprises an ion source which generates cluster ions each comprised of two or more atoms, a pulsing mechanism which pulses the cluster ions, a selecting mechanism which selects ions having a specific mass number from the pulsed cluster ions and passes the selected ions in an ON state of the selecting mechanism, and, passes the pulsed cluster ions without the selecting in an OFF state of the selecting mechanism, and a time-of-flight mass spectrometric unit which measures a mass spectrum of secondary ions generated from a sample using a difference in time of flight when the sample is irradiated with the ions passed through the selecting mechanism.

An information acquisition method for acquiring information on a target object, that includes a step of promoting ionization of the target object using a substance for promoting ionization of the target object to cause the target object to emit, and a step of acquiring information on the mass of the flew target object using time-of-flight secondary ion mass spectrometry.

The present invention provides a method of analysis which couples principle component analysis (PCA) with ToF-SIMS for obtaining surface chemical information from minerals. Statistical methods, based on the monolayer-sensitive time of flight secondary ion mass spectrometry (ToF-SIMS) technique, combined with principal component analysis (PCA) identifies combinations of factors strongly correlated (positively or negatively) in images or spectra from sets of data. In images, PCA selects these correlations from the mass spectra recorded at each of 256×256 pixels in a selected area of particles. In the image mode, PCA provides a much better method of selecting particles by mineral phase with clearer definition of particle boundaries due to multi-variable recognition.

A method of evaluating conjugation between materials using imaging of time-of-flight secondary ion mass spectrometry (TOF-SIMS) according to the present invention is carried out by following the steps, a) forming a spontaneous pattern on a substrate with a mixture containing nanoparticles and a conjugation material selected from organic, bio or inorganic material, b) obtaining an ion detection pattern from the conjugation material and nanoparticles, respectively, depending on their position on the substrate by using time-of-flight secondary ion mass spectrometry, and c) determining whether the conjugation is formed between the conjugation material and nanoparticles by comparing the ion detection pattern of the conjugation material with the ion detection pattern of the nanoparticles.

A measurement method is provided, which enables to obtain a two-dimensional image with better quantitative-ability by suppressing the influence of the charge-up, when the two-dimensional secondary ion image is obtained for a biological material fixed on a substrate having a high resistivity by utilizing a TOF-SIMS method in a certain wide area. A two-dimensional image having considerably high positioning resolution-ability can be obtained by the procedure in which the pulsed primary ion beam is irradiated at a spot, and the pulse-wise spot-applications of the primary ion beam and the simultaneous detection of the secondary ion generated from the irradiated primary ion beam proceed along with a discontinuous scanning pattern, and eventually the results of these secondary ion measurements are reconstructed into a two-dimensional image in line with the aforementioned discontinuous scanning pattern.

A battery including an electrolytic solution. The electrolytic solution including a compound having a sulfonyl group and at least one peak of ions is selected from the group consisting of Li3SO4+, Li3SO3+, Li2SO3+, and Li2SO2+ as a positive secondary ion and LiSO4−, LiSO3−, SO3−, and SO2− as a negative secondary ion is obtained by surface analysis of the anode using Time of Flight Secondary Ion Mass Spectrometry after charge and discharge.

Provided is a metal-coated polyimide resin substrate that exhibits a high level of adhesion after aging at 150 DEG C for 168 hours without a reduction in the initial close adhesion between a metal-coated polyimide resin film and a metal layer. The metal-coated polyimide resin substrate is produced as follows. After surface modification is applied to one surface or both surfaces of a polyimide resin film using a wet method, a dry method, or a combination thereof, a barrier layer is formed using a wet method, a seed layer is subsequently formed using a wet method or a dry method, and a conductive film is formed on the surface layer using a wet method. The metal-coated polyimide resin substrate is characterized in that the thickness of a mixed layer of a polyamide residue and a barrier-metal layer residue at the peeled surface on the conductive film layer side of said metal-coated polyimide resin substrate after the metal-coated polyimide resin substrate is subjected to a 90 DEG peel test is 2.6 nm or less, in terms of Si sputtering speed, when measured by means of a depth profile analysis using a time-of-flight secondary ion mass spectrometer (TOF-SIMS), and the peel strength retention rate after a 168-hour aging test at 150 DEG C (peel strength after aging at 150 DEG C for 168 hours / initial peel strength) is 50% or higher.

A photomask blank including a transparent substrate, and at least one film (A) containing chromium and nitrogen and free of silicon and at least one film (B) containing silicon and oxygen, and free of a transition metal that are contacted to each other In the blank, when an intension of secondary ions is measured along a thickness direction of the films by a time-of-flight secondary ion mass spectrometry (TOF-SIMS), an intension of secondary ions derived from Cr2O5 is lower than an intension of secondary ions derived from SiN, at a position located at the interface or its vicinity of the film (A) and film (B) and having a maximum intensity of secondary ions derived from SiCrO5.

Provided is a sample fixing member for a time-of-flight secondary ion mass spectrometer, capable of preventing contamination of a solid sample, capable of stably fixing the solid sample, and capable of accurately detecting secondary ions in a time-of-flight secondary ion mass spectrometer. This sample fixing member for a time-of-flight secondary ion mass spectrometer includes a fibrous columnar structure comprising a plurality of fibrous columnar objects having a length of at least 200 [mu]m.