The invention provides a piezoelectric driven and detected miniature hemispherical resonant
gyroscope and a manufacturing method thereof. The
gyroscope comprises a
monocrystalline silicon base, a center-fixed supporting column, a miniature hemispherical
resonator, a common
electrode, eight film piezoelectrics and eight uniformly-distributed
signal electrodes, wherein the
monocrystalline silicon base and the miniature hemispherical
resonator are connected through the center-fixed supporting column; the common
electrode has the same shape as that of the miniature hemispherical
resonator and is located between the miniature hemispherical resonator and the piezoelectrics; the piezoelectrics have the same shapes as those of the
signal electrodes and are located between the common
electrode and the
signal electrodes. The miniature hemispherical resonator is excited to work by adopting a piezoelectric driven manner, and a drive mode and a detection mode are matched with each other. The
gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk
silicon processing process and a surface
silicon processing process. According to the piezoelectric driven and detected miniature hemispherical resonant gyroscope and the manufacturing method thereof, the miniature gyroscope is driven and detected by using the inverse piezoelectric effect and the piezoelectric effect, so that the gyroscope has the characteristics of high degree of integration, low
power consumption, convenience in
mass production, and the like.