Micro-hemispherical resonator gyroscope based on borosilicate glass annealing forming and preparing method

Abstract

The invention discloses a micro-hemispherical resonator gyroscope based on borosilicate glass annealing forming and a preparing method of the micro-hemispherical resonator gyroscope. A silicon wafer is used as a substrate to form a silicon substrate, a cylindrical cavity and a center supporting pillar in the circle center of the cavity are etched on the upper surface of the silicon wafer, and the center supporting pillar is connected with the center of a hemispherical resonator to form a suspension structure. Meanwhile, eight flat plate type electrodes are evenly distributed on the periphery of the cylindrical cavity in the upper surface of the silicon wafer and around the hemispherical resonator, and the eight flat plate type electrodes are composed of the four driving electrodes and the four detection electrodes. All the driving electrodes and all the detection electrodes are not in contact with the hemispherical resonator, identical gaps exist, and the driving electrodes and the detection electrodes are arranged in sequence alternately. The prepared glass metal blowing type micro-hemispherical resonator gyroscope has the advantages of being simple in structure, low in surface stress, high in symmetry and the like, and therefore the micro-hemispherical resonator gyroscope can have stable performance and a wider application range.

Description

technical field [0001] The invention belongs to the technical field of micro inertial sensors in MEMS, in particular to a micro hemispherical resonant gyroscope based on borosilicate glass annealing and a manufacturing method. Background technique [0002] With the development of national defense technology and civilian industry, gyroscopes have become very important inertial devices in the fields of attitude control, navigation and positioning. Among them, the hemispherical resonant gyroscope is recognized as the best performance due to its precise scaling factor, satisfactory random drift and bias stability, and insensitivity to the external environment (acceleration, vibration, temperature, etc.). One of the gyro products. The precision of hemispherical resonant gyroscope is even higher than that of fiber optic gyroscope and laser gyroscope, and it also has the advantages of high resolution, wide measurement range, anti-overload, anti-radiation, and anti-interference. T...

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Problems solved by technology

However, this type of technology has problems such as high equipment requirements, large surface stress, low yield, low electrode consistency, and difficulty in ensuring symmetry.

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