99results about How to "Improve light emission efficiency" patented technology

The invention discloses a silicon-based light-emitting device and a preparation method thereof. The device includes a silicon substrate, the front of the substrate is etched to form a nano-column photonic crystal array, and a film layer containing a silicon nanocrystal quantum dot structure is conformally deposited on the array, and the film layer is covered with a transparent conformal electrode. Ohmic contact electrodes are deposited on the bottom and back; the method is as follows: using microsphere mask etching technology on the front of the substrate to obtain a silicon nanocolumn photonic crystal array through deep reactive ion etching, and then co-existing on the silicon nanocolumn photonic crystal array. Formally grow a thin film layer containing a nano-silicon quantum dot structure and a transparent conformal electrode, and deposit an ohmic contact electrode on the back of the substrate to obtain the target product. The silicon-based light-emitting device of the present invention adopts photonic crystal nano-column array and silicon nano-crystal quantum dot structure at the same time, which effectively improves the light extraction efficiency and carrier injection efficiency, thereby improving the luminous intensity and light emission efficiency of the device, and the device structure is simple, The process is simple and the cost is low.