The invention discloses a surface tunneling miniature electron source, an array thereof and an implementation method of the array. The surface tunneling miniature electron source is of a planar multi-region structure and comprises an insulation substrate, wherein two conductive regions and an insulation region are arranged on a surface of the insulation substrate, the insulation region is arranged between the two conductive regions and are connected with the two conductive regions, and the minimum distance between the two conductive regions, namely the minimum width of the insulation region is smaller than or equal to 100 nanometers. Compared with an existing tunneling electron source having a perpendicular multi-layer structure, the electron source and the array thereof have the advantages of high electron emission efficiency, simple structure, easiness in array integration on a large scale and the like, are convenient to process and can be widely applied to various electronic devices relating to the electron source, such as an X-ray tube, a microwave tube and a flat-panel display.