The invention provides a multi-module packaging
vacuum furnace for
welding elements. The multi-module packaging
vacuum furnace comprises a vacuum cavity, jigs, a lifting device, a movable baffle mechanism, a heating mechanism, a
water cooling mechanism, a valve pump mechanism and a control device. The lifting device, the movable baffle mechanism, the heating mechanism, the
water cooling mechanismand the valve pump mechanism are in communication connection with the control device. The invention further provides a using method of the
vacuum furnace. The using method comprises the steps that themultiple
layers of jigs are placed into a cavity body from bottom to top; the interior of the cavity body is vacuumized, and a baffle extends out to form a shielding state; when the vacuum degree inthe cavity body reaches the activation vacuum degree, a lower heating carrying table is heated to an
activation temperature, the temperature is kept for a first time period, and after the cavity bodyis cooled to a safety temperature, the baffle is reset and returns to the reset state; the lifting device descends to the lowest point, a tube shell jig layer is tightly attached to a
germanium windowjig layer, and heating is carried out to a
welding temperature; and after
welding is completed, the welded elements are taken down from the tube shell jig layer. According to the multi-module packaging vacuum furnace and the using method, the efficient function of multiple modules is realized.