8310results about "Plug valves" patented technology

A substrate processing apparatus includes a processing vessel provided with a stage holding thereon a substrate to be processed and evacuated at an evacuation port, and a source gas supplying system that supplies plural source gases to the processing vessel separately in the form of a laminar flow, wherein the evacuation port has a slit-form shape extending in a direction generally intersecting perpendicularly to a direction of the laminar flow, the evacuation port is engaged with a valve having a valve body formed with a slit-form opening corresponding to the slit-form shape of the evacuation port, the slit-form opening being provided so as to cause a displacement with respect to the evacuation port in a direction generally intersecting perpendicularly to an extending direction of the evacuation port, the valve changing a degree of valve opening thereof via displacement of said slit-form opening.

Methods and apparatus for calibrating a plurality of gas flows in a substrate processing system are provided herein. In some embodiments, a substrate processing system may include a cluster tool comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber; a first flow controller to provide a process gas to the first process chamber; a second flow controller to provide the process gas to the second process chamber; a mass flow verifier to verify a flow rate from each of the first and second flow controllers; a first conduit to selectively couple the first flow controller to the mass flow verifier; and a second conduit to selectively couple the second flow controller to the mass flow verifier.

An OLED display and touch screen system includes a substrate; an OLED display including an array of individually addressable OLEDs formed on the substrate; and a touch screen including an OLED laser light emitter formed on the substrate, a light sensor formed on the substrate across the display from the light emitter, and optics located around the display above the light emitter and the light sensor for directing light emitted from the OLED laser light emitter across the display to the light sensor.

This invention provides microfluidic devices that comprise a fluidics layer having microfluidic channels and one or more regulating layers that regulate the movement of fluid in the channels. The microfluidic devices can be used to mix one or more fluids. At least a portion of the fluidics layer can be isolated from the regulating layer, for example in the form of a shelf. Such isolated portions can be used as areas in which the temperature of liquids is controlled. Also provided are instruments including thermal control devices into which the microfluidic device is engaged so that the thermal control device controls temperature in the isolated portion, and a movable magnetic assembly including magnets with shields so that a focused magnetic field can be applied to or withdrawn from the isolated portion or any other portion of the microfluidic device. Also provided are methods of mixing fluids. The methods include stacking a plurality of alternating boluses of different liquids in a microfluidic channel, and moving the stacked boluses through the channel. In another method, the boluses are moved into a diaphragm valve having a volume able to accommodate several boluses, and then pumping the liquids out of the valve.

A blood sampling device for allowing a fluid pressure measurement and a fluid sample to be taken from a patient, having an inlet port configured to receive blood from the patient, an outlet port configured to be coupled to a monitoring channel having an infusion fluid, a sampling port configured for extraction of blood from the patient, a sampling channel configured to self-flush, after extraction, the blood with the infusion fluid, and an auxiliary channel for self-flushing the sampling channel.

The invention relates to the technical field of oil-gas field construction operation equipment, in particular to an anti-sand-accumulation plug valve which comprises a valve body, a valve cover and aplug rod arranged in the valve body. The valve body is connected with the valve cover; the lower end part of the plug rod is connected with a plug; a driver is arranged on the upper end part of the valve body and is connected with the valve body; the driver transmits a torque to the plug rod through a flat key; a sealing rubber core is arranged on the outer part of the plug; a piston is arranged on the upper part of the sealing rubber core; an annular seal cavity is formed among the plug, the plug rod and the piston; a spring is arranged in the seal cavity; the piston, the plug rod, the sealing rubber core and the plug are located in an inner core of the valve body; the inner core of the valve body communicates with an oil passage; and the oil passage is filled with hydraulic oil for driving the piston to move up and down. According to the anti-sand-accumulation plug valve provided by the invention, a gap between the sealing rubber core and the plug can be adjusted, and no gap exists among the plug, the sealing rubber core and the valve body during a pressure-bearing and fluid conveying process, so that sand is prevented from being accumulated.

A subsea actuator and method is disclosed that includes a removable monolithic cap / hydraulic chamber that seals the actuator housing top with seals placed around the monolithic cap, defines a straight hydraulic line and port for control line hydraulic fluid, and provides for fasteners to secure the top of the subsea actuator. The monolithic cap / hydraulic chamber is so limited in metal and machine time that it can be a throw-away maintenance item. A preferably cup-shaped spring lifter is provided in telescoping relationship to the hydraulic chamber. Several short hydraulic fluid passageways are provided in the bottom cup portion of the spring lifter to permit assist hydraulic control fluid into the hydraulic chamber below the piston. The driving stem provides a removable connection to the hydraulic piston from the top of the actuator housing and a quick disconnect permits disconnection of the driving stem from the valve stem. The high tension spring does not need to be removed to perform maintenance, and all wear items and seals are readily accessible. Change or replacement of the stem packing is made from the top of the bonnet to avoid dissasembling the bonnet to valve body connection. The spring chamber within the actuator housing may be increased in size to accommodate a larger spring as necessary for fail-safe operation without changing the size of the hydraulic chamber. All sliding components ride on wear rings to increase the lifetime of reliable subsea operation. The moving components are mounted in a compact, concentric configuration.

The cooking appliance (1) having a control panel (2) is equipped with one or more gas flow (Q) regulating valves, wherein the rotary regulator organ (6) is provided with various peripheral through holes (16–19). The control knob (9) being interchangeable for fitting to the actuating shaft (7), is chosen from the two units available, one and the other permitting different angular limit positions (A2, A3) for the supply of a constant minimum gas flow Qmin, through one of two successive holes (18, 19) calibrated each one for a different type of gas NG or LPG, one or the other hole being superimposed to a valve inlet duct (4) at a different angular position A2, A3. An integral lug (14) on the control knob (9) running into a slide groove (20) in the control panel (2), establishes a first rotation stop A2.

A drink supply canister for a beverage dispensing apparatus. The drink supply canister includes a removable valve assembly member having a drink supply outlet valve and a gas inlet valve. The beverage dispensing apparatus pressurizes the drink supply canister by supplying gas to the gas inlet valve. The beverage dispensing apparatus includes a drink supply canister holder for holding a plurality of such drink supply canisters. The beverage dispensing apparatus directs a supply of water and gas to the drink supply canister holder for producing carbonated and non-carbonated beverages.

The present invention relates to a sterile transfer device for fluids, be they liquids or gases. It is comprised of a body having a bore formed through at least a portion of its interior. Preferably, it is a central bore formed through the entire length of the body. Contained within the bore is a movable plunger. The body has a first and a second end. The first end contains a face designed to be attached to the upstream component. The second end is connected to a downstream component such as a filter, pipeline, sample bag and the like. The plunger has corresponding first and second ends. The first end of the plunger when it the closed position is in alignment with the face of the body which combined form a steamable surface and a sterile barrier against the environment to the rest of the interior of the body, the plunger and downstream components.

A microdevice is provided for controlling fluid flow. The microdevice includes a substantially planar contact surface and a plurality of fluid-transporting features associated therewith. Also included is a substrate having a substantially planar contact surface and a fluid-transporting feature associated therewith. The contact surfaces are positioned in slidable and fluid-tight contact to allow for controllable formation of a plurality of different flow paths upon alignment of the substrate fluid-transporting feature with each cover plate fluid-transporting features in succession. Typically, at least one of the cover plate and substrate is comprised of a biofouling resistant polymer, and the flow paths are of different lengths. Optionally, a plurality of fluid-transporting features is associated with the substrate so that flow paths are formed as a result of a different alignment of the fluid-transporting features.

A valve assembly is disclosed for use in conjunction with a replaceable filter cartridge system. The valve assembly includes a head member having an interior valve chamber defining a central axis, and inlet and outlet passages extending parallel to and communicating with the interior valve chamber. The valve assembly further includes a valve member having an inlet path and an outlet path, adapted for rotation within the interior valve chamber of the head member between a filter position wherein the inlet path of the valve member is in communication with the inlet passage of the head member and a bypass position wherein the inlet path of the valve member is out of communication with the inlet passage of the head member. The valve assembly further includes a seal member seated in an upper surface of the valve member and positioned to seal against an opposing surface of the interior valve chamber. The seal member sealingly isolates untreated and treated fluid streams flowing through the inlet and outlet paths of the valve member, respectively, when the valve member is in the filter position, and sealingly isolates the inlet and outlet passages of the head member from the atmosphere when the valve member is in the bypass position to permit fluid to flow therebetween.

An airflow control valve for a clean room having a duct section with a damper positioned within the duct. The damper being capable of an adjustment from an open position to a closed position. The opening and closing of the duct is accomplished through a magnetic coupling such that the duct can remain sealed during operation. The airflow control valve includes a sensor for measuring the airflow rate, so that the duct can be adjusted to maintain one or more predetermined flow rate set-points.

The seal assembly is disclosed for use with a valve having a trim cage with an inner surface extending along in axis and a plug sized to fit inside the trim cage inner surface, wherein the plug is adapted to move along the axis thereof. A seal ring is attached to an upstream portion of the cage to effectuate a seal with the plug. The plug is equipped with a wiper seal that cleans or otherwise removes debris from the seating surface of the seal ring, an interior surface of the seal ring and an interior surface of the cage during both the opening and the closing of the valve. Thus, the valve is self-cleaning. Further, the wiper seal delays throttling action through the valve until the plug has moved a substantial distance away from the seating surface of the seal ring which reduces high pressure abrasive flow against the seating surface of the seal ring to reduce wear on the trim set.

An air discharge valve comprises a pipe connection base, a rotary member, at least one seal member and a buffer member. The pipe connection base comprises at least one pipe member which comprises an orifice; the rotary member and the buffer member are both axially connected with the pipe connection base to rotate about a rotation axis relative to the pipe connection base; the rotary member comprises at least one operational part, and the at least one seal member is connected with the rotary member and corresponded to the orifice; the buffer member comprises at least one corresponding operational part, and a rotation buffering space is reserved between each corresponding operational part and each operational part. When the rotary member is at a first orientation relative to the pipe connection base, each seal member correspondingly seals and closes each orifice; when the rotary member is driven by the buffer member and rotated to a second orientation relative to the pipe connection base, each seal member is removed from each orifice so that air in each pipe member can be discharged from the corresponding orifice.

An integrated module for extracorporeal blood treatment has a flat-shaped support element which exhibits on an internal face thereof a complex of fluid distribution lines and on an external face thereof a high-flow dialyzer. The support element has a base body which exhibits fixture seatings, each of which houses an axially extended tract of a fluid distribution line. The tract of the fluid distribution line, with respect to adjacent tracts, has an increased diameter due to the presence of a junction collar made of a rigid material. Each fixture seating exhibits two axial locators for positioning the axially extended tract of a fluid distribution line in a fixed position. The locators interact with the junction collar, and the distribution lines can be fixed to the base body by a resilient fixture of the junction collars in the seatings without gluing. The module is configured to be mounted on an apparatus for intensive treatment of renal insufficiency.

A laminated coating protects a metal substrate in a highly corrosive and highly erosive environment. A coating of a noble metal, such as gold, is bonded to the metal substrate, such as by electroplating or by flame spray. The noble-metal coating protects the metal substrate from the corrosive effects of a process fluid. A ceramic material, such as chromium oxide or titanium dioxide, is bonded to the noble-metal coating. Ceramic materials resist abrasion very well, which protects the underlying noble-metal coating from the erosive / abrasive effects of the process solution, which may contain suspended solids that are highly abrasive. However, the ceramic material is somewhat porous, which allows some seepage of the process fluid. The metal substrate is protected from the corrosive effects of the process fluid by the noble-metal coating.

A trunnion type ball valve having valve seats that are laterally moveable within seat recesses of the valve and establish sealing engagement with a valve ball member that is trunnion supported for rotational movement between open and closed positions. The valve seat members are self-centering for optimum sealing engagement with the spherical sealing surface of the ball member. The internal geometry of the seat assemblies are designed to permit optimum flow through the valve mechanism even under circumstances where the seat members are located in laterally off-center relation with respect to the centerline of the flow passages due to self-centering seat movement. The ball valve is readily adapted for fire-safe application via the use of heat resistant seals and metal-to-metal sealing of components to prevent or minimize leakage in the event of seal destruction or degradation by excess heat.

Embodiments of the present invention relate to a method and apparatus for rapid delivery of pulses of one or more reactants to a substrate processing chamber. One embodiment of a valve body includes a first inlet, a second inlet, and an outlet. A valve chamber is in fluid communication with the first inlet, the second inlet, and the outlet. A valve seat is formed at least around the first inlet. The valve chamber further includes an annular groove formed around the valve seat coupling the second inlet and the outlet. One embodiment of a pneumatic valve assembly includes a valve body having at least two ports. A valve seat surrounds one of the ports. The pneumatic valve assembly further includes a diaphragm assembly having a diaphragm movable to open and close the one port. A piston housed in a cylinder is coupled to the diaphragm to actuate the diaphragm. An actuation chamber is formed between the cylinder and the piston. In certain embodiments, the internal volume of the actuation chamber is about 3.0 cm3 or less.

A novel disk drive includes an enclosure and a disk rotatably mounted to and within the enclosure. The disk drive enclosure has a fill port opening with an internally threaded section and an internal annular seating surface. A fill port valve is disposed within the fill port opening. The fill port valve includes an externally threaded section that is engaged with the internally threaded section of the fill port opening, an external annular seating surface in contact with and forming a continuous annular seal with the internal annular seating surface of the fill port opening, and a gas flow channel spanning the externally threaded section of the fill port valve. The disk drive may be helium-filled, and may also include a metal foil seal that is externally adhered to the disk drive enclosure and covers the fill port opening and the fill port valve.

Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.

A surge prevention valve may be used to prevent the formation of an initial surge of high pressure. The valve may be located, for example, between a high pressure gas cylinder and a medical pressure regulator. The valve is provided with first and second valves located within a housing and integrating a pressurization orifice. The initial opening of the valve in an axial direction enables gas to flow through the pressurization orifice at a first flow rate. The full opening of the valve in the axial direction enables the gas to flow through the second valve at a second flow rate, which is much higher than the first flow rate. The controlled pressurization of the gas through the orifice delays the time during which the gas reaches full recompression.