205 results about "X ray spectra" patented technology

An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.

An x-ray generator capable of generating multiple selected spectra of x-rays to penetrate an object being studied is described. An x-ray detector designed so as to detect and/or image different x-ray spectra selectively is also described. Undesired spectral components can be rejected, and desired spectral components accepted for detection and/or imaging.

A method for forming a three-dimensional reconstructed image acquires two dimensional measured radiographic projection images over a set of projection angles, wherein the measured projection image data is obtained from an energy resolving detector that distinguishes first and second energy bands. A volume reconstruction has image voxel values representative of the scanned object by back projection of the measured projection data. Volume reconstruction values are iteratively modified to generate an iterative reconstruction by repeating, for angles in the set of projection angles and for each of a plurality of pixels of the detector: generating a forward projection that includes calculating an x-ray spectral distribution at each volume voxel, calculating an error value by comparing the generated forward projection value with the corresponding measured projection image value, and adjusting one or more voxel values using the calculated error value and the x-ray spectral distribution. The generated iterative reconstruction displays.

A sorting system and method with a conveyance for transporting items to be sorted at a predetermined speed. An XRF spectrometer subsystem includes at least one x-ray source directing x-ray energy at an item carried by the conveyance and a detector responsive to x-rays emitted by the item and producing a spectral signal characterizing a leading edge of the item and a trailing edge of the item. A diverter subsystem downstream of the XRF subsystem is for diverting sorted items. An electronic processing subsystem is responsive to the detector signal and is configured to determine if the item is to be diverted based on the elemental makeup of the item from its x-ray spectrum. The same processing subsystem is also configured to calculate the position of the item on the conveyance based on the detector signal and together with the predetermined speed of the conveyance controlling the diverter subsystem to divert selected items.

An x-ray spectrometer system comprising an x-ray imaging system with at least one achromatic imaging x-ray optic and an x-ray detection system. The optical train of the imaging system is arranged so that its object focal plane partially overlaps an x-ray emitting volume of an object. An image of a portion of the object is formed with a predetermined image magnification at the x-ray detection system. The x-ray detection system has both high spatial and spectral resolution, and converts the detected x-rays to electronic signals. In some embodiments, the detector system may have a small aperture placed in the image plane, and use a silicon drift detector to collect x-rays passing through the aperture. In other embodiments, the detector system has an energy resolving pixel array x-ray detector. In other embodiments, wavelength dispersive elements may be used in either the optical train or the detector system.

Disclosed are methods and apparatus for classifying defects based on X-ray spectrum obtained from the defects. In general terms, the present invention provides pattern recognition techniques for accurately and efficiently classifying a defect based on an X-ray spectrum obtained from such defect and its surrounding substrate and structures, no matter the complexity of such substrate and structures. A pattern recognition technique generally includes training a pattern recognition process to recognize particular types of X-ray spectrum obtained from specimens as belonging to a particular defect type or other specific characteristic of a specimen. Once a pattern recognition process is set up to recognize or classify particular X-ray spectrum, the pattern recognition process can then be utilized to automatically classify specimens as having a specific characteristic or defect type.

A method and a device are proposed for determining the type of fluid in a fluid mass in an object. X-ray attenuation data is supplied from one or a plurality of X-ray recordings of an object area including the fluid mass in the object, which were acquired with at least two different X-ray spectra or detector weightings. The X-ray attenuation data is used to determine values for effective atomic number and density for the fluid mass and average these to obtain a mean value for effective atomic number and density for the fluid mass. Comparison data is also supplied, which indicates fluctuation ranges for combinations of effective atomic number and density for different types of fluid. The mean values for effective atomic number and density of the fluid mass are compared with the comparison data to determine the fluctuation range and thereby the type of fluid, into which the two mean values fall. The method and associated device can be used to determine the type of fluid in a fluid mass in an object in a reliable and unambiguous manner.

Methods are disclosed utilizing synchrotron X-ray microscopy including x-ray fluorescence and x-ray absorption spectra to probe elemental distribution and elemental speciation within a material, and particularly a solid that may have one or more elements distributed on a solid substrate. Representative materials are relatively homogeneous in composition on the macroscale but relatively heterogeneous on the microscale. The analysis of such materials, particularly on a macroscale at which their heterogeneous nature can be observed, provides valuable insights into the relationships or correlations between localized concentrations of elements and/or their species, and concentrations of other components of the materials. Sample preparation methods, involving the use of a reinforcing agent, which are advantageously used in such methods are also disclosed.

The invention relates to a conductor crossover for a semiconductor detector, particularly for a drift detector for conducting X-ray spectroscopy. The conductor crossover comprises at least two doped semiconductor electrodes (2), which are placed inside a semiconductor substrate (1), at least one connecting conductor (M), which is guided over the semiconductor electrodes (2), and a first insulating layer (Ox). An intermediate electrode (L) is situated between the connecting conductor (M) and the first insulation layer (Ox). Said intermediate electrode overlaps the area of the semiconductor substrate (1) between the semiconductor electrodes (2) and is electrically insulated from the connecting conductor (M) by at least one additional insulation layer (I). The invention also relates to a drift detector equipped with a conductor crossover of this type and to a detector arrangement for conducting X-ray spectroscopy.

The present invention is directed to a system and method for dual-energy (DE) or multiple-energy (spectral) cone-beam computed tomography (CBCT) using a configuration of multiple x-ray sources and a single detector. The x-ray sources are operated to produce x-ray spectra of different energies (peak kilovoltage (kVp) and/or filtration). Volumetric 3D image reconstruction and dual or triple energy 3D image decomposition can be executed using data from the CBCT scan. The invention allows for a variety of selections in energy and filtration associated with each source and the order of pulsing for each source (“firing pattern”). The motivation for distributing the sources along the z direction in CBCT includes extension of the longitudinal field of view and reduction of cone-beam artifacts.

A single column inductively coupled plasma source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the ICP to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.

Method of and system for adaptive scatter correction in the absence of scatter detectors in multi-energy computed tomography are provided, wherein input projection data acquired using at least two x-ray spectra for scanned objects may include a set of low energy projections and a set of high energy projections; wherein a low-pass filter of variable size is provided; the method comprises estimating the size of the low-pass filter; computing amounts of scatter; and correcting both sets of projections for scatter. The estimation of low-pass filter size comprises thresholding high energy projections into binary projections; filtering the binary projections; finding the maximum of the filtered binary projections; calculating the low-pass filter size from the found maximum. The computation of amounts of scatter comprises exponentiating input projections; low-pass filtering the exponentiated projections with the estimated filter size; computing the amounts of scatter from the filtered projections.

An apparatus and a method for automatically inspecting a defect by an electron beam using an X-ray detector. The composition of a defective portion is analyzed with higher rapidity and the cause of the defect is easily and accurately determined based on an X-ray spectrum. The X-ray spectrum and the image of foreign particles formed on a process QC wafer are registered as reference data, and the defects generated on a process wafer are classified by collation with the reference data. The use of both the X-ray spectrum and the detected image optimizes the operating conditions for X-ray detection. A defect of which the X ray is to be detected is selected based on the result of classification of defect images automatically collected, and the defect is classified according to the features including both the composition and the external appearance.

Systems and methods for providing independent exposure detection, X-ray spectrum and timing compensation, and providing an exposure termination signal to an X-ray system. The system incorporates an interface for receiving exposure characteristic data such as kVp, spectral filter, and focal spot. The system through a programmed controller determines one or more control parameters based on the received exposure characteristic data and generates a control signal for controlling an X-ray source.

The nanofabrication of a hydrogen gas nanosensor device from single straight and branched, tripod shaped ZnO nanorods using in-situ lift-out technique, performed in the chamber of a focused ion beam (FIB) system is disclosed. Self-assembled ZnO branched nanorods have been grown by a cost-effective and fast synthesis route using an aqueous solution deposition method and rapid thermal processing. The properties of the ZnO nanorod structures were analyzed by X-ray diffraction, scanning electron microscopy, energy dispersion X-ray spectroscopy, transmission electron microscopy and micro-Raman spectroscopy. High quality ZnO nanorods were obtained with a 90% success rate for building nanodevices. The fabricated nanosensor can gauge 150 ppm hydrogen gas in the air at room temperature. The nanosensor has selectivity for other gases such as oxygen, methane, carbon monoxide and liquid propane gas. The ZnO nanorod sensors of the present invention also operate at low power of less than 5 microwatts.

A positive active material for a lithium-ion secondary battery includes a lithium composite oxide particle containing nickel atoms, manganese atoms, and fluorine atoms. The lithium composite oxide particle includes a particle center portion and a surface layer portion that is closer to a surface of the lithium composite oxide particle than the particle center portion is. A fluorine atom concentration Fc (at %) of the particle center portion measured by energy dispersive X-ray spectroscopy is lower than a fluorine atom concentration Fs (at %) of the surface layer portion.