The invention relates to high-temperature-resistant, anti-
corrosion and insulating vapor deposition equipment. The high-temperature-resistant, anti-
corrosion and insulating vapor deposition equipment comprises a vapor
reaction chamber, wherein the vapor
reaction chamber comprises a base, a heat-isolation frame, a gas inlet, a
wafer tray and a gas outlet, the base is fixedly arranged at the bottom of the vapor
reaction chamber, and the heat-isolation frame is erected above the base and fixedly connected with the base; the
wafer tray is arranged on the upper surface of the base, the gas inlet is formed in the top of the heat-isolation frame, and the gas outlet is formed in one side surface of the heat-isolation frame; and the heat-isolation frame is made of modified
quartz. The heat-isolation frame is used for isolating a temperature in the reaction chamber, so that
normal reaction is guaranteed, meanwhile, energy waste can be reduced, the
wafer tray is used for bearing wafers to complete deposition, the gas inlet is used for guiding reaction gas into the reaction chamber, and the gas outlet is used for discharging redundant gas. The high-temperature-resistant, anti-
corrosion and insulating vapor deposition equipment is characterized in that the heat-isolation frame in the vapor reaction chamber is improved, so that the vapor deposition equipment can bear higher temperature and is more durable.