The invention relates to a method for producing flexible
capacitor touch sensor, characterized in composed of middle layer preparation of PDMS, preparation of flexible PI substrate, graph
metal sensitive
electrode and relative electric connection, preparation of a first high-elasticity
dielectric layer PDMS and a second flexible
dielectric layer PI, graph
metal drive
electrode and relative electric connection, graph a top flexible insulation protective layer PI, separation of the flexible
capacitor touch sensor. The invention optimizes and combines techniques, to realize the compatibility of organic flexible material PDMS, PI and traditional MEMS technique. And the
capacitor touch sensor has compact structure, high
mechanical strength, and high flexibility, while the product can contact the surface with any curvature to sense the volumes of
normal force and tangent force, and be applied for the production of flexile capacitor touch
sensor array.