According to the high-power and high-efficiency on-chip silicon-based dual-mode terahertz signal source structure, output signals in a voltage-controlled oscillator array are set to pass through an on-chip combiner, power output by multiple paths of voltage-controlled oscillators is synthesized, meanwhile, the output power of an active circuit including the voltage-controlled oscillator array and a frequency multiplier circuit is improved, the output power of the terahertz source is improved; the efficiency of the terahertz source is improved by improving the quality factor of the inductor in the voltage-controlled oscillator and reducing the loss of the on-chip combiner; the band-stop network is arranged in the frequency multiplier circuit to be grounded, so that frequency signals are prevented from being leaked to the ground, the signals are output from the output end as far as possible, and power and efficiency are improved.