The invention provides a curved-surface special-shaped MEMS two-dimensional scanning micro-mirror which comprises an outer frame, an inner frame, a coil, a curved-surface mirror surface, a
fast axis and a slow axis. The curved-surface mirror surface is located in the center of the overall structure and connected with the inner frame through the
fast axis, and the inner frame is connected with the outer frame through the slow axis. The curved-surface mirror surface adopts a spherical crown surface and is a curved surface left after a spherical surface is
cut by a plane. The coil is built-in, an external permanent
magnet provides a
magnetic field forming a 45-degree angle with the micro-mirror, torsion of torsion arm beams of the
fast axis and the slow axis is controlled through the
Lorentz force in the Z direction, and scanning of the slow axis and the fast axis, namely the Y axis and the X axis, is realized. Under the control of electromagnetic force, the curved-surface special-shaped two-dimensional scanning micro-mirror realizes periodical and high-frequency swing on the X axis and the Y axis. According to the MEMS two-dimensional scanning micro-mirror, a curved-surface special-shaped structure is adopted, a
plane mirror is replaced by a curved-surface mirror, the scanning view field of the MEMS two-dimensional scanning micro-mirror is greatly increased, and the scanning angle of a
laser radar is increased.