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Double-scanning view filed shared window laser radar system based on micro-mirror

A technology of micromirror and window, which is applied in the field of lidar system with double scanning field of view and shared window, which can solve the problems of increasing system size and cost, complex receiving optical path, and difficulty in applying portable devices

Active Publication Date: 2018-05-29
WUXI INFISENSE PERCEPTION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of the laser radar system with separate transceivers is that the direction distribution of the echo light field is relatively wide, which makes the receiving optical path more complicated, increases the system size and cost, and is difficult to apply to portable devices

Method used

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  • Double-scanning view filed shared window laser radar system based on micro-mirror
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  • Double-scanning view filed shared window laser radar system based on micro-mirror

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Experimental program
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Effect test

Embodiment 1

[0030] Such as figure 1 As shown, in order to ensure that the lidar system has a sufficiently large scanning angle, the present invention provides a micromirror-based doubled scanning field of view shared window lidar system, including: a laser 1, a laser beam splitter 2, a first single-sided Reflector 5, micromirror 3, reflector 4, second single-sided reflector 6, first converging lens 52, second converging lens 62, first photodetector 53 and second photodetector 63;

[0031] A first through hole 51 is opened on the first one-way reflector 5; a second through hole is opened on the second one-way reflector 6;

[0032] The laser beam generated by the laser 1 is divided into two paths by the laser beam splitter 2, and one path of the laser beam is emitted to the micromirror 3 through the first through hole 51, and then emitted to the detector through the micromirror 3. Target 7; another laser beam is reflected by the reflector and exits to the micromirror 3 through the second t...

Embodiment 2

[0053] In the lidar system described in Embodiment 1, the micromirror 3 is an important optical relay component and scanning device in the optical path. On the one hand, the size of the reflection surface of the micromirror 3 defines the maximum reflection area; on the other hand, the micromirror 3 realizes the scanning of the light beam based on its own scanning structure.

[0054] Further, the micromirror 3 is a dynamically deformable micromirror.

[0055] In the present embodiment two, the basic structure of the mirror surface of the micromirror 3 is as follows: figure 2 As shown, it includes an outer mirror 10 and an inner mirror 11. The inner mirror 11 is connected to the outer mirror 10 via a connecting mechanism 12, and the outer mirror 10 is connected to an external fixed anchor point through a torsion shaft 13. The outer mirror 10, the inner mirror 11 and the connection mechanism 12 form a whole to rotate around the rotation axis, and the connection mechanism 12 is ...

Embodiment 3

[0059] exist figure 2 A structure of the micromirror 3 is shown in , in which the inner mirror 11 is rotated about the axis of rotation. During the rotation and oscillation process, the natural rotational frequency of the micromirror as a whole is determined by the total moment of inertia of the micromirror and the stiffness coefficient of the torsion axis 13 . Therefore, by adjusting the shape and size of the connecting mechanism 12, the overall rotation frequency of the micromirror is much lower than the natural frequency of the vibrator formed by the connecting mechanism 12 and the inner mirror 11. The size of the connecting mechanism 12 can be adjusted by adjusting the first width ( H1 ) and the first distance ( L1 ), and the shape of the connecting mechanism 12 can be formed by changing the etched pattern.

[0060] exist image 3 In the micromirror structure shown, four arc-shaped grooves are etched on the same circumference on the SOI with the center of the inner mirr...

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Abstract

The invention discloses a double-scanning view filed shared window laser radar system based on a micromirror, the laser beam generated by a laser is divided into two paths through a laser beam splitter, one path of laser light beams is emitted to the micro-mirror through a first through hole, and is emitted to a detection target through the micro-mirror; and the other path of laser light beam is reflected by a reflector and then is emitted to the micromirror through a second through hole, and is emitted to the detection target through the micro-mirror; the laser beams emitted to the micromirror through the first through hole and the second through hole have a first included angle theta; the echo light beams reflected from the detection target are reflected to the first single-side reflector and the second single-side reflector through the micromirror, and are received by the corresponding light detectors. According to the invention, the laser beam splitter is used for doubly scanning the view field, and the laser radar system can achieve a large enough scanning angle, and is particularly suitable for being applied to full-automatic driving with high requirement on a scanning view field.

Description

technical field [0001] The invention relates to a laser radar, in particular to a micromirror-based double-scanning field-of-view shared-window laser radar system. Background technique [0002] LiDAR is a high-precision distance measurement device. As an active detection device, lidar is not affected by day and night and has strong anti-interference ability. In addition to applications in fields such as terrain mapping, it has also attracted great attention in the fields of autonomous driving and drones in recent years. Traditional lidar uses multiple lasers combined with the design of mechanical rotating structure, which is not only slow and bulky, but also high energy consumption and high cost. Using a micromirror instead of a mechanical rotating structure can greatly reduce the size of the device, increase the scanning frequency, and consume less energy. In addition, since the micromirror can form a one-dimensional scanning mirror surface and scan in a two-dimensional ...

Claims

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Application Information

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IPC IPC(8): G01S7/481
CPCG01S7/4811G01S7/4817
Inventor 虞传庆王鹏陈文礼王宏臣孙丰沛董珊
Owner WUXI INFISENSE PERCEPTION TECH CO LTD
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