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The present invention is an exposure apparatus that exposes a substrate through a projection optical system and a liquid, comprising: a first nozzle member, which is provided in the vicinity of the image plane side of the projection optical system, that has a supply port that supplies the liquid and a first recovery port that recovers the liquid; and a second nozzle member, which is provided on the outer side of the first nozzle member with respect to a projection area of the projection optical system, that has a second recovery port, which recovers the liquid, that is separate from the first recovery port. The first nozzle member and the second nozzle member are mutually independent members.

A zeolite membrane support for supporting a zeolite membrane includes a metal substrate having a metal oxide layer at its surface. Preferably, the metal oxide layer has a thickness in the range of 1 nm to 10 μm and comprises chromia, silica, or alumina. Preferably, the metal substrate is porous, having a mean pore size in the range of 10 nm to 50 μm, and comprises an iron-based metal. A zeolite composite membrane includes the zeolite membrane support and a zeolite membrane which includes an external zeolite layer lying over the surface at and / or an internal zeolite layer lying in the pores at the metal oxide layer side of the zeolite membrane support. The zeolite membrane preferably has a composition satisfying the relationship SiO2 / Al2O3≦10.

An apparatus for manufacturing a composite structure body is provided which forms structure body having the constitution in which the crystals of more than one type of brittle material are dispersed and having novel properties without involving a heating / sintering process. The apparatus includes an aerosol generator configured to generate an aerosol. The aerosol is generated through dispersing fine particles of more than one type of brittle material, or dispersing composite fine particles, in a gas. The apparatus also includes a nozzle configured to spray the aerosol, a classifier configured to classify the brittle material fine particles in the aerosol, and a disintegrating machine for disintegrating agglomerations of the brittle material fine particles in the aerosol. The composite structure body is manufactured in reduced pressure conditions by bombarding a substrate with the aerosol at a high velocity, whereby at least one of crystals and microstructures of said brittle materials are dispersed.

The photomask of this invention includes, on a transparent substrate, a semi-shielding portion having a transmitting property against exposing light, a transparent portion having a transmitting property against the exposing light and surrounded with the semi-shielding portion, and an auxiliary pattern surrounded with the semi-shielding portion and provided around the transparent portion. The semi-shielding portion and the transparent portion transmit the exposing light in an identical phase with respect to each other. The auxiliary pattern transmits the exposing light in an opposite phase with respect to the semi-shielding portion and the transparent portion and is not transferred through exposure.

A pin (125) is moved down in a nozzle (121), the end of paste (101) protruded from the discharge opening (122) of the nozzle (121) to a target object (102) is brought into contact with the target object (102), and the pin (125) is moved away from the discharge opening (122) to divide the paste in contact with the target object.

An image recording apparatus for exposing a photosensitive material includes two pairs of nip rollers. One pair of nip rollers is disposed upstream from a position at which the photosensitive material is exposed, and the other pair of nip rollers is disposed downstream from the exposure position. When a leading edge of the photosensitive material passes through the upstream pair of nip rollers, both pairs of nip rollers are moved into a position at which to nip the photosensitive material to prevent the photosensitive material from becoming jammed. When the leading edge of the photosensitive material passes through the downstream pair of nip rollers, the pairs of nip rollers are moved out of the nipping position to allow edges substantially parallel to a conveyance path of the photosensitive material to be aligned in the direction substantially orthogonal to the conveyance path.

A composite structure body obtained through a plurality of processes including forming composite fine particles by way of a process in which a surface of the fine particles of a brittle material is coated with another brittle material; then by bombarding the composite fine particles against a surface of a substrate at high velocities, an anchor portion biting the substrate surface is formed; the composite fine particles are simultaneously distorted and fractured by impact of the bombardment; mutual rejoining of the composite fine particles is made through intermediary of a newly generated active surface formed by the distortion or fracture; and thereby forming a structure body in which crystals and / or microstructures of the brittle materials are dispersed above the anchor portion; and a pre-processing which includes imparting internal distortion to the brittle material fine particles.

Provided is an initial crack formation device (1) for scoring a front-side end (Ga) in a conveyance direction (B) of a glass ribbon (G) conveyed by a belt conveyer (3) so as to form an initial crack group (CG) including a plurality of aggregated initial cracks (C) in a width direction of the front-side end (Ga) orthogonal to the conveyance direction (B). The initial crack formation device (1) includes a flap wheel (4) for scoring the front-side end (Ga) while rotating in a direction of drawing the glass ribbon (G) into the conveyance direction (B). The flap wheel (4) is configured to rotate at a rotational peripheral speed higher than a conveyance speed of the glass ribbon (G).

A stage apparatus PST is provided with a holder PH, which has a substrate holding surface 33A that holds a substrate P; a stage 52, which supports and moves the holder PH; and a recovery apparatus 60, which is disposed in the vicinity of the holder PH and has lyophilic parts 3, 5 of which at least a part of each is lyophilic, that uses the lyophilic parts 3, 5 to recover a liquid 1. As a result, the infiltration of liquid into the space between the substrate and the holder is prevented, even if performing an exposure treatment by filling the space between a projection optical system and the substrate with the liquid.

A welding apparatus includes a first electrode tip; a second electrode tip opposing the first electrode tip; and an electrically conductive part which is provided so as to be freely interposed between the second electrode tip and a work and ensures electrical conduction between the second electrode tip and the work when the electrically conductive part is interposed between the second electrode tip and the work, the electrically conductive part including an electrically conductive member one side of which opposes the work with a presence of a void space from the work when the electrically conductive member is interposed between the second electrode tip and the work, and against which the second electrode tip is abutted on another side thereof, and a pair of electrically conductive abutment members which are provided integrally with the electrically conductive member in such a manner as to extend toward the work, and distal ends of which are abutted against the work, a position of abutment of the electrically conductive member against the second electrode tip being positioned between the pair of abutment members.

A substrate processing method includes a substrate holding step of holding a substrate horizontally, a liquid droplet discharging step wherein liquid droplets of an organic solvent, formed by mixing the organic solvent and a gas, are discharged from a double-fluid nozzle toward a predetermined discharge region within an upper surface of the substrate, and a liquid film forming step, executed before the liquid droplet discharging step, of supplying the organic solvent to the double fluid nozzle without supplying the gas, so as to discharge the organic solvent in a continuous stream mode from the double-fluid nozzle to form a liquid film of the organic solvent covering the discharge region on the upper surface of the substrate.

A film with alignment film which stably causes liquid crystal alignment and is excellent in adhesion between its constituting layers so as to give a high endurance and an excellent re-workability, and further to provide an optical device using the same. The film with alignment film contains at least a resin substrate and an alignment film, wherein the film is provided with a photocurable resin layer between the resin substrate and the alignment film, the photocurable resin layer being formed by use of a photo-cleaving type photopolymerization initiator. The optical device contains at least a resin substrate, an alignment film, and an optically functional layer, wherein the device is provided with a photocurable resin layer between the resin substrate and the alignment film, the photocurable resin layer being formed by use of a photo-cleaving type photopolymerization initiator.

A welding apparatus includes a first electrode tip; a second electrode tip opposing the first electrode tip; and an electrically conductive part which is provided so as to be freely interposed between the second electrode tip and a work and ensures electrical conduction between the second electrode tip and the work when the electrically conductive part is interposed between the second electrode tip and the work, the electrically conductive part including an electrically conductive member one side of which opposes the work with a presence of a void space from the work when the electrically conductive member is interposed between the second electrode tip and the work, and against which the second electrode tip is abutted on another side thereof, and a pair of electrically conductive abutment members which are provided integrally with the electrically conductive member in such a manner as to extend toward the work, and distal ends of which are abutted against the work, a position of abutment of the electrically conductive member against the second electrode tip being positioned between the pair of abutment members.

A semiconductor device having a silicon substrate, an element isolating film, an active region, a gate electrode provided via a gate insulating film, a diffusion layer provided on the active region on opposite sides of the gate electrode, an interlayer insulating film, and a plug filled in a hole formed on the interlayer insulating film, wherein the semiconductor device further has a contact forming region surrounded by the element isolating film, and a conductive layer formed on the contact forming region, the gate electrode extends so as to overlap with a portion of the contact forming region and is connected to the conductive layer at the overlapping portion, and the plug contacts the conductive layer at another portion of the contact forming region and is electrically connected to the gate electrode via the conductive layer.

A cathode active material precursor particle, a method for producing thereof and a method for producing cathode active material for a lithium secondary battery. The cathode active material precursor particle is capable of forming a cathode active material for a lithium secondary battery including a lithium composite oxide having a layered rock salt structure through lithium incorporation. The particles are characterized by the cathode active material precursor particle being formed into a substantially spherical shape and includes therein a large number of voids in a substantially uniform manner; and the cathode active material precursor particle has: an average particle diameter D50 of 0.5 to 5 μm; a specific surface area of 3 to 25 m2 / g; and a relative tap density, which is a value obtained by dividing a tap density by a theoretical density of a material constituting the cathode active material precursor particle, of 0.25 to 0.4.

A stretchable cable 1 includes a sheet-shaped stretchable base material 2 exhibiting elasticity and elongated in one direction, and a stretchable wiring 3 formed on one surface of the stretchable substrate 2 and exhibiting elasticity. The stretchable base material 2 is made of a material exhibiting elasticity. The stretchable wiring 3 is made of a conductive composition including elastomer and a conductive filler filling the elastomer.

Mg and Bi are contained in each of a first fillet in a first braze joining portion in which a tube and a fin join, a second fillet in a second braze joining portion in which the tube and a header plate join, and a third fillet in a third braze joining portion in which the header plate and a tank body join. A concentration of Mg of each of the first to third fillets is from 0.2% or more to 2.0% or less by mass. When the tube includes a brazing material layer, a concentration of Mg of the tube at its plate thickness center is from 0.1% or more to 1.0% or less by mass. When the fin includes a brazing material layer, a concentration of Mg of the fin at its plate thickness center is from 0.2% or more to 1.0% or less by mass.