30results about How to "Avoid radio frequency interference" patented technology

The invention provides a temperature adjustment device and method of a focusing ring. Energy is radiated onto the focusing ring by plasma and is downwards transferred to a base by a first thermal conduction pad, an insulation ring and a second thermal conduction pad, the first thermal conduction pad is in contact with a lower surface of the focusing ring, the insulation ring is in contact with a lower surface of the first thermal conduction pad, the second thermal conduction pad is in contact with a lower surface of the insulation ring, the base is in contact with the second thermal conduction pad, cooling and temperature reduction are performed by a cooling system arranged at the base, a heater which is arranged in a shielding ring is started to generate a controllable external heating source, the shielding ring is connected with the ground, energy of the external heating source is transferred to the focusing ring by the shielding ring, a third thermal conduction pad, an insulation ring and the first thermal conduction ring, the third thermal conduction pad is in contact with the shielding ring, the insulation ring is in contact with the third thermal conduction pad, and controllable temperature rise is performed on the focusing ring. By providing a good heat conduction cooling path and by combining a heating mode of a controllable parameter, fine control on a working temperature of the focusing ring is achieved, the focusing ring is tunable during etching, so that the process demand is satisfied.

The present invention provides a method and system for avoiding terminal radio frequency interference. The terminal supports a first mode and a second mode; a first frequency band in the first mode and a second frequency band in the second mode interfere with each other. The method comprises: when the terminal initiates a first service, if the first service is initiated at the first frequency band, querying whether an ongoing second service works in the second frequency band; if the second service works in the second frequency band, setting the first frequency band to a disabled state, and sending to a network side information of the first frequency band set to the disabled state. The above method and system for avoiding terminal radio frequency interference do not require any change on the network side or addition of signaling between the network and the terminal. The radio frequency interference can be avoided by just using related messages in the existing network, and frequency band resources can be saved, thereby improving the utilization rate of the high-frequency band resources.