The invention relates to a
germanium-on-insulator (GeOI) structure mixed with patterned single-
crystal silicon and a manufacturing method thereof. The GeOI structure is characterized in that an
active layer is composed of single-
crystal germanium and single-
crystal silicon, and the
crystal orientation of the single-crystal
silicon is determined by substrate silicon. The key point for preparing the structure is to prepare a GeOI single-crystal film. The substrate with the GeOI structure mixed with patterned single-crystal silicon is prepared by the steps of: transferring a single-crystal
germanium film on an insulator by using
plasma low temperature bonding and low temperature stripping techniques, and performing selective
etching and single-crystal silicon
epitaxy on the single-crystal germanium film. The inventive GeOI structure mixed with patterned single-crystal silicon can be used for
gallium arsenide epitaxy, so as to integrate with III-V semiconductors. Meanwhile, the patterned single-crystal silicon material can be used for conventional
CMOS processing to prepare conventional devices and circuits, so as to effectively solve the
self healing effect of an embedded oxidation layer. The GeOI structure mixed with patterned single-crystal silicon has important application prospects in high-speed high-performance
CMOS devices,
optoelectronic integrated circuits, high-speed photodetectors, etc.