The invention discloses a preparation method for a micro-texturing three-layer composite
lubricant thin film. The surface of
monocrystalline silicon is etched to obtain a microcosmic rough structure with regular equilateral-hexagon array morphology, and then through molecular self-
assembly,
polymer and
ionic liquid technologies, a (3-aminopropyl) trimethoxy
silane (APS) substrate fixation thin film layer, a polydopamine (PDA)
intermediate junction thin film layer, and a carboxyl imidazolium
ionic liquid (IL-COOH) fixation / flow two-phase
lubricant thin film are sequentially obtained on the surface of a micro-texturing
silicon slice, and the micro-texturing three-layer composite
lubricant thin film is formed. According to the micro-texturing three-layer composite lubricant thin film prepared through the preparation method, surface texture, a self-assembled
molecular film, a
polymer thin film and an
ionic liquid thin film are integrated reasonably, and the
tribology performance of the surface of the
monocrystalline silicon is effectively improved. The preparation method has good application prospects in the micro electro
mechanical system surface protection field.