The invention discloses an imaging ellipsometer based on magneto-optical effect, which relates to a film thickness measurement method and a device, particularly to a method and a device for observing the thickness distribution of a nano film on the surface of a sample. The ellipsometer is characterized in that a polarizer, a compensator and an analyzer capable of rotating in the direction of a transmission axis are adopted to correct a system, a magneto-optical modulation technology is adopted to change the polarization direction of the received light, a plane array detector is adopted to record the ellipsometry images of the film on the surface of the sample, iterative algorithm is adopted to process the data, and the shape parameters of the film on the surface of the sample are precisely measured. The imaging ellipsometer based on magneto-optical effect solves the defects of the prior art, improves the precision in detecting the polarization of the received light, and improves the measurement speed.