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530 results about "Beam tube" patented technology

Gantry for medical particle therapy facility

A particle therapy gantry for delivering a particle beam to a patient includes a beam tube having a curvature defining a particle beam path and a plurality of fixed field magnets sequentially arranged along the beam tube for guiding the particle beam along the particle path. In a method for delivering a particle beam to a patient through a gantry, a particle beam is guided by a plurality of fixed field magnets sequentially arranged along a beam tube of the gantry and the beam is alternately focused and defocused with alternately arranged combined function focusing and defocusing fixed field magnets.
Owner:BROOKHAVEN SCI ASSOCS

Charged Particle Beam Device With Retarding Field Analyzer

The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube voltage; and a retarding field analyzer in the vicinity of the beam tube element to detect secondary charged particles generated by the primary charged particle beam on the specimen. According to the invention, the retarding field analyzer thereby comprises an entrance grid electrode at a second voltage; at least one filter grid electrode at a first voltage; a charged particle detector to detect the secondary charged particles; and at least one further electrode element arranged between the entrance grid electrode and the at least one filter grid electrode. The at least one further electrode element reduces the size of the stray fields regions in the retarding electric field region to improve the energy resolution of the retarding field analyzer. The improvement of the energy resolution is significant, in particular when the beam tube element is part of a high voltage beam tube.
Owner:ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK GMBH

Gantry for Medical Particle Therapy Facility

A particle therapy gantry for delivering a particle beam to a patient includes a beam tube having a curvature defining a particle beam path and a plurality of fixed field magnets sequentially arranged along the beam tube for guiding the particle beam along the particle path. In a method for delivering a particle beam to a patient through a gantry, a particle beam is guided by a plurality of fixed field magnets sequentially arranged along a beam tube of the gantry and the beam is alternately focused and defocused with alternately arranged focusing and defocusing fixed field magnets.
Owner:BROOKHAVEN SCI ASSOCS

Coal mine underground mobile gas beam tube sampling and monitoring device

The invention relates to a coal mine underground mobile gas beam tube sampling and monitoring device which mainly structurally comprises a gas-water separator, a vacuum pump, a gas sampling and monitoring control cabinet, an oxygen sensor, a methane sensor, a carbon monoxide sensor, a circuit board, a sampling beam tube, a dust precipitator, a dehumidifier, a gas control valve, a gas flow meter, a pressure gauge and a negative pressure gauge; beam tube sampling, dust precipitation and dehumidification, gas-water separation, flow control, sensor information capturing, control cabinet monitoring and control and micro-computer information processing are adopted for pre-warning, forecasting, analyzing and displaying fire gas concentration, and working out the gas change law; the device has the advantages of advanced and reasonable design, compact structure, easy operation and convenient operation, can move in a long distance in coal mine underground to acquire and monitor the fire gas in different coal bed gob areas or closed spaces, the monitoring distance can reach 5000m, the measurement data is accurate and reliable, and the accuracy can reach 96 percent; and the device can also be used on the ground or other ores.
Owner:邬剑明

Mine gas beam tube monitoring system and recognition method for gas explosivity and fire danger

The invention relates to a mine gas beam tube monitoring system, comprising an automatic sampling device which consists of a gas path switching electromagnetic valve and a suction pump. The gas path switching electromagnetic valve is connected with a partial channel through a sampler and a single-core beam tube of a moisture separator and then a conduit head through a partial beam tube cable and is controlled by a programmable controller after a main beam tube cable is connected with a moisture separator box. The system is characterized in that the monitoring system also comprises an automatic sampling device which is composed of a sample making device. The sample making device consists of a non-oil injection pump and a conversion electromagnetic valve controlled by the programmable controller, a shunting needle-shaped valve with an emptying end, a dryer, a filtering device, a quantitative tube and a single-core beam tube of a flow meter which are successively connected through an automatically sampling pipe. The automatic sampling device is connected with a gas chromatography detection device for analyzing and outputting data to a computer. The computer controls the programmable controller and outputs detection results. The dryer and the filtering device are provided with long service life. The measuring point number extension is convenient and can be maintained easily. The cost is low. The sampling device samples steadily. The precision of detected gas is high. A recognition method for the gas explosiveness and the fire hazard is disclosed. The decision according to the analysis result is clear and prompt.
Owner:CCTEG SHENYANG RES INST

Center beam tube type cable

The invention relates to the technical field of cables, in particular to a center beam tube type cable, which comprises a center beam tube (3) containing optical fibers (1) and internal water resisting objects (2). A reinforcer (4) is coated along the outer wall of the center beam tube in a longitudinal extending and spiral mode by taking the axis of the center beam tube as a center, and the reinforcer (4) is externally provided with a protective layer (7), an external water resisting object (6) is arranged between the protective layer (7) and the center beam tube, and a sheath layer (8) is arranged outside the protective layer (7). The center beam tube type cable is characterized in that in at least one filler (5) is contained in the reinforcer (4). In the invention, because the reinforcer directly contacts with the center beam tube and is tightly wrapped on the center beam tube, the contraction of the center beam tube due to temperature change is effectively resisted, and the opticalfibers are effectively protected; in addition, because the non-metallic filler is contained in the reinforcer, the weight of the cable is greatly decreased, the requirements of towers and foundationsthereof are reduced, and therefore, the cost is greatly reduced.
Owner:沈群华

Optical cable secondary-coating bulge detecting device

The invention relates to an optical cable secondary-coating bulge detecting device which comprises a soleplate, a connecting pipe and a guide wheel fixing plate, wherein the guide wheel fixing plate comprises at least three leading-in guide wheels, a leading-out guide wheel, a movable guide wheel and a detecting mechanism, wherein the axes of the three leading-in guide wheels are parallel, the movable guide wheel can move up and down, and the detecting mechanism is used for detecting the displacement magnitude of the movable guide wheel to judge the size and the position of a bulge on a beam tube; when the bulge of the beam tube is detected, the beam tube is led in through the leading-in guide wheels; and when the beam tube passes through the movable guide wheel, if the jump of the movable guide wheel exceeds set displacement, a detecting switch is toggled to simultaneously indicate that the lager bulge exists in the beam tube, and a signal is transmitted out to a control unit through the detecting switch, so that the concrete position of the bulge can be computed to be convenient for the preprocessing of the next working procedure, and the loss can be avoided. The whole detecting device has simple structure, is easy to realize and has greater practicability.
Owner:TONGDING INTERCONNECTION INFORMATION CO LTD

Coal mine spontaneous fire fiber temperature detection beam tube monitoring system and method

The invention relates to a coal mine spontaneous fire fiber temperature detection beam tube monitoring system and a method, and belongs to the field of coal mine spontaneous fire tendency monitoring and predicting. The coal mine spontaneous fire fiber temperature detection beam tube monitoring system comprises a beam tube monitoring system, distributed fiber temperature detection monitoring systems and a monitoring and analyzing system, wherein the beam tube monitoring system and the distributed fiber temperature detection monitoring systems are respectively connected with the monitoring and analyzing system. The method comprises the following steps: A, the beam tube monitoring system collects underground gas, detects and analyzes gas elements, and transmits data to a monitoring mainframe; B, the monitoring mainframe computes collected gas elements and contents of the collected gas elements according to the data obtained in the step A, and judges fire tendency according to gas element change; C, the distributed fiber temperature detection systems utilize a Raman scattering effect to obtain a temperature change curve of a whole fiber at different positions, and transmit the associated data to the monitoring mainframe; D, the monitoring mainframe receives the data obtained in the step C in real time; E, the monitoring mainframe performs correlation statistic analysis on the data obtained in the step D, determines the fire tendency and determines the position of a fire source point. According to the coal mine spontaneous fire fiber temperature detection beam tube monitoring system and the method, the firing tendency can be judged, and meanwhile, the position of the fire source point can be determined.
Owner:淄博祥龙测控技术有限公司

Portable microscopic visualization tube for determining ovulation from saliva assay

A portable microscopic visualization tube for determining ovulation from saliva assay is disclosed. A portable microscopic visualization tube for determining ovulation period from saliva having a microscopic lens module, a beam tube, an electric powered LED mechanism, and a tube cap, and the LED mechanism includes a button battery seat, characterized in that the mounting position of the edge of the button seat and the inner wall of the beam tube is correspondingly formed into engageable recessing block or protruding block such that the entire LED mechanism can be withdrawn from the beam tube to replace the button battery within the button battery seat.
Owner:YEH GARY

Method for determining air-leakage rate of oxidized zone of goaf

The invention relates to a method for determining air-leakage rate of an oxidized zone of goaf, and belongs to the technical field of coal mine downhole spontaneous combustion disaster prevention. The method includes firstly, determining nitrogen injection flow rate; secondly, burying beam tubes for gas component measurement in the goaf to determine change of concentration of oxygen; thirdly, establishing a numerical computing module, and determining concentration distribution of oxygen in the goaf and the air-leakage rate on the condition without nitrogen injection by a numerical simulation process; fourthly, performing a thermogravimetric experiment to coal samples sampled from the work face, acquiring oxygen concentration on the condition without weight gaining, and serving the oxygen concentration as an inerting fireproof index of the goaf; fifthly, dividing the spontaneous combustion three-zone of the goaf; sixthly, selecting the widest section of the oxidized zone in the goaf, simulating dividing results of the spontaneous combustion three-zone of the goaf to determine the boundary according to a fitted equation of field real-time measured oxygen concentration distribution results, and solving the average oxygen concentration of the section in the oxidized zone; seventhly, determining nitrogen purity in an actual nitrogen injection process of the work face; and eighthly, determining the air-leakage rate of the oxidized zone of the goaf according to a nitrogen injection quantity calculation formula.
Owner:LIAONING TECHNICAL UNIVERSITY

Coal spontaneous combustion monitoring and early warning system for coal mine goaf

InactiveCN104088669ASolve the problem of large-scale temperature monitoringImprove stabilityMining devicesBeam tubeCoal
The invention provides a coal spontaneous combustion monitoring and early warning system for coal mine goaf. The coal spontaneous combustion monitoring and early warning system comprises a distributed temperature sensing optical cable, a multi-parameter monitoring device, an underground looped network switch, a monitoring center switch, a monitoring host and a gas pipe. The multi-parameter monitoring device is provided with an optical cable interface, a sampled gas inlet, a sampled gas outlet, a communication end and a wireless communication end. The distributed temperature sensing optical cable is in signal and electric connection with the optical cable interface of the multi-parameter monitoring device, the gas pipe is connected with the sampled gas inlet and the sampled gas outlet of the multi-parameter monitoring device, the communication end of the multi-parameter monitoring device is in bidirectional signal and electric connection with the underground looped network switch, the monitoring center switch and the monitoring host, and when in use, the wireless communication end of the multi-parameter monitoring device is in wireless communication with a wireless remote control device. By means of the coal spontaneous combustion monitoring and early warning system, wide-range temperature monitoring and remote gas monitoring of beam tubes in the goaf is achieved. In addition, the coal spontaneous combustion monitoring and early warning system for the coal mine goaf is low in deployment cost and good in monitoring and early warning timely performance, stability and reliability.
Owner:TIANDI CHANGZHOU AUTOMATION +1

Neutron ray rotary irradiation device

The invention provides a neutron ray rotary irradiation device which can realize miniaturization. The neutron ray rotary irradiation device (1) is provided with a neutron generating part (2), a speed reducing member (9), a collimator (3), two deflection electric magnets (4 and 5) and a beam tube (6), wherein the neutron generating part (2) is provided with a target (7) for generating a neutron through being irradiated by an ion beam; the speed reducing member (9) is used for reducing the speed of the neutron; the collimator (3) is arranged at the emergence side of the neutron generating part (2); the two deflection electric magnets (4 and 5) are used for making the ion beam deflected; and the beam tube (6) is used for conveying the ion beam. A communicating opening (10a) for communicating a target accommodating part (10) with the beam tube (6c) is arranged at a position lower than the top (10b) of the target accommodating part (10), and an angle alpha formed by the irradiation direction (F1) of the ion beam to the target (7) and the ejection direction (F2) of the neutron is 90 degrees.
Owner:SUMITOMO HEAVY IND LTD

Sterilization by low energy electron beam

A sterilization apparatus wherein one or more electron beam tubes are used to direct electron beams into an ambient gaseous environment to create an electron plasma cloud into which non-sterile target objects may be moved. The electron plasma cloud is formed by interaction of the electron beam with the ambient atmosphere. Helium or other like gaseous may be used to expand the effective volume of the electron plasma cloud. Manipulators are used to move target objects in the electron plasma cloud, exposing non-sterile surfaces to the cloud and then joining the surfaces together where appropriate. The beam tube used to generate the electron beam has a thin low energy absorbing window which allows relatively low energy beams to be used, minimizing damage to materials within the surface of the target objects.
Owner:USHIO AMERICA

Atomic beam tube with counter optical or atomic beams

An atomic beam tube for frequency standard which employs either counter propagating optical beams or counter propagating atomic beams and Coherent Population Trapping (CPT) is disclosed. Atoms selected from the group consisting of the alkali metal family (Cesium, Rubidium, Potassium, Sodium and Lithium) are emitted from one or two sources to form a single or double atomic beams. The atoms interact with the optical beams at two crossing points. The optical beams are generated by a laser and are modulated at half the hyperfine frequency. The optical beam is splitted into two counter propagating beams in round paths which interact with the atomic beam at two interaction regions. The interaction with the light causes the atoms to enter a CPT state. A dark line in the fluorescence at the second crossing is used to lock an RF oscillator to the atomic hyperfine transition.
Owner:SEPA SISTEMI ELETTRONICI PER AUTOMAZIONE +1

Method for controlling goaf air leakage in exploitation process of shallow buried close-range coal seam

The invention provides a method for controlling goaf air leakage in the exploitation process of a shallow buried close-range coal seam. The method mainly comprises technologies such as plugging of earth surface air leaking fractures and detecting and plugging of downhole air leaking channel, namely, first, the widths of earth surface mining-induced fractures are measured and the speed of fracture air leaking is calculated; the fractures with the widths and the air leaking air speeds being out of gauge are plugged, an air inlet roadway and an air outlet roadway which are difficult to cave by a roof in a goaf is caved by a manual way, and air leaking toward the goaf is reduced; next, a beam tube monitoring system is used for monitoring the concentration of O2 in the goaf, and whether air leaking exists or not in the goaf is judged according to the concentration of O2; then, a tracer gas method is used for detecting air leaking channels of downhole coal pillars, the air inlet roadway, the air outlet roadway and the like, and corresponding plugging measures are adopted; and at the time of plugging, a fan-air-window combined pressure regulating method is used for balancing air pressure of the goaf and a working face, goaf air leaking is reduced, and coal spontaneous combustion in the goaf is avoided.
Owner:CHINA UNIV OF MINING & TECH

Telescopic handle five-way pipe rotating shaft portable electric bicycle capable of being dragged

The invention provides a telescopic handle five-way pipe rotating shaft portable electric bicycle capable of being dragged comprising a telescopic rotating handle, a front fork, a front frame, a middle beam, a middle link member, a towing wheel, a rear fork, a seat, a front wheel, a rear wheel, a human power drive system and an electric drive system; the telescopic handle is connected with the front fork and the front frame; the front frame is formed by a rotary part and a front link member; the middle beam comprises a beam tube, a front inner chock, a rear inner chock, a front slot piece and a rear slot piece; the middle link member is formed by connecting a main connecting member and a shock avoiding block; the rear fork member is formed by connecting a five-way pipe, two five-way pipe connecting members, a shock avoiding stop piece and two rear fork pieces. the seat is formed by connecting a seat tube, a locking link member, a connecting rod, a saddle and a folding positioning hook; the front wheel is installed on the front fork and the rear wheel is installed on the rear fork member; the drive mechanism comprises a middle shaft, two cranks, a chain wheel, two pedals, a flywheel and a chain. the electric drive system comprises a motor, a battery, a controller and a control switch.
Owner:浙江衢州星月神电动车有限公司

Method and apparatus for reforming laminated films and laminated films manufactured thereby

There is provided a method for reforming laminated films, which simultaneously reforms a plurality of laminated films by irradiating electron beams on the laminated films. The method for reforming laminated films includes the steps of forming a lower film by coating a first low dielectric material in liquid form on a surface of a substrate; forming an upper film by coating a second low dielectric material in liquid form on the lower film; and irradiating electron beams on the lower and upper film. A laminated film manufacturing system includes a mounting table for mounting thereon a substrate on which the laminated films are formed; and an electron beam unit having a plurality of electron beam tubes for irradiating electron beams on the laminated films to thereby simultaneously reform the films.
Owner:TOKYO ELECTRON LTD

Target recovering device

The present invention provides a target recovering device capable of easily recovering target parts of neutron generating device. A neutron speed reducer (7) has a containing chamber (8a) containing the target device (5), which has a target (6). The neutron speed reducer (7) moves relative to a beam tube (11), the target device (5) exposes from the containing chamber (8a). A recovering container (43) is configured below the target device (5) to relieve connection of a main connection mechanism (13) connecting the target device and the beam tube (11) freely. Therefore the target device relived from the beam tube (11) is dropped, and is contained into the recovering container (43). As a result, the target (6) and the target device (5) may be dissembled and easily recovered.
Owner:SUMITOMO HEAVY IND LTD

Single mandril spoke type superconductive accelerating cavity and manufacture method thereof

The invention relates to a single mandril spoke type superconductive accelerating cavity and a manufacture method thereof. The accelerating cavity is characterized by comprising a cylindrical cavity barrel which is formed by punching and welding four arch plates, wherein a mandril hole is respectively formed on each of two opposite arch plates; a cleaning tube is respectively arranged on each of the other two opposite arch plates; one end of each cleaning tube positioned outside the cavity barrel is respectively connected with a flange; two ends of the cavity barrel are respectively provided with an end cover; the middle of the surface of each end cover is internally indented, and an end cover beam tube respectively penetrates through the middle of the surface of each end cover; the two end cover beam tubes are respectively connected with a flange; the mandril is arranged between the mandril holes in the cavity barrel; the mandril is a thin wall cavity, the middle section of the mandril is in a straight barrel shape, the two ends of the mandril are in symmetrical funnel shapes, and two funnel-shaped ports are correspondingly arranged in the two mandril holes; a center beam tube penetrates through the middle section of the mandril; and the center beam tube and the two end cover beam tubes are positioned in the same axis. In the accelerating cavity, a transverse electromagnetic wave mode is adopted for acceleration, and the requirements of high gradient, high efficiency, high acceptability, high stability and the like can be met. The accelerating cavity can be used for accelerating protons at full energy section.
Owner:PEKING UNIV

Tubular lipstick plastic shell assembling machine

The invention discloses a tubular lipstick plastic shell assembling machine. A base material feeding mechanism, a base glue feeding mechanism, a spiral tube material feeding mechanism, a press fitting mechanism and a semi-finished product discharging mechanism are sequentially arranged in the peripheral direction of a first assembling machine table rotary disc. A primary base spiral tube combination feeding mechanism and an oiling mechanism are sequentially arranged in the peripheral direction of a second assembling machine table rotary disc. A middle beam tube feeding mechanism, a storage body feeding mechanism, a storage body pressing-down mechanism, a secondary base spiral tube combination feeding mechanism, a base spiral tube press fitting mechanism and a finished product discharging mechanism are sequentially arranged in the peripheral direction of a third assembling machine table rotary disc. The primary base spiral tube combination feeding mechanism conveys semi-finished products discharged from the semi-finished product discharging mechanism onto the second assembling machine table rotary disc. The secondary base spiral tube combination feeding mechanism conveys the semi-finished products from the oiling mechanism onto the third assembling machine table rotary disc. The tubular lipstick plastic shell assembling machine can achieve full-automatic and streamline operation of assembling of lipstick plastic shells, lower the cost and improve the industrial competitiveness.
Owner:COPOLYMER & COSMETICS TECH KUNSHAN

Optical time domain reflection (OTDR) distributed optical fiber sensing system based on Brillouin scattering and subsurface temperature monitoring method using same

InactiveCN101787882AAvoid the effects of stressMeasure the temperature directlySurveyConstructionsBeam tubeFrequency shift
The invention provides an optical time domain reflection (OTDR) distributed optical fiber sensing system based on Brillouin scattering and a subsurface temperature monitoring method using the same, which relates to a temperature sensing system and a temperature monitoring method. The invention solves the problems of poor corrosion resistance, low sensitivity, complex structure and poor stability of the existing subsurface temperature monitoring sensor. A temperature sensor comprises an oil charging beam tube, an optical fiber and a PE sheath, wherein the oil charging beam tube is arranged at the center of the PE sheath, the optical fiber is arranged at the center of the oil charging beam tube, and the optical fiber is arranged along the direction of the oil charging beam tube. The temperature monitoring method comprises the following steps: (1) extending the temperature sensor downwards to the bottom end of an oil tube H, and measuring Brillouin frequency shift VB2 (epsilon 2, T2) at the moment; (2) moving the temperature sensor upwards for N meters, and measuring Brillouin frequency shift VB1 (epsilon 1, T1) at the moment; and (3) subtracting the Brillouin frequency shift measured in the step (1) from the Brillouin frequency shift measured in the step (2), and computing temperature change in different depths. The invention realizes real-time on-line monitoring of subsurface working condition temperature.
Owner:HARBIN INST OF TECH

Accelerator driven sub-critical system split type central measuring cylinder system

The invention provides an accelerator driven sub-critical system split type central measuring cylinder system which mainly comprises large and small plugs, a central measuring cylinder main fan-shaped section welded below the large plug, a central measuring cylinder branched fan-shaped section welded below the small plug, a control rod driving mechanism, a proton beam tube, a measuring guide tube, a refueling machine and the like, wherein the large plug is positioned in the center of a system top cover; the small plug is screwed to the large plug and is eccentric to the large plug; the refueling machine is arranged on the small plug and is eccentric to the small plug; and the proton beam tube penetrates through the center of the large plug. During system operation, the lower fan-shaped sections of the large and small plugs are closed to form the central measuring cylinder, the lower fan-shaped section of the small plug rotates during refueling, so that the refueling mechanism enters the system to replace a fuel component. The system mainly aims at an accelerator driven lead bismuth cooling rapid neutron transmutation system, and the problem that the system core refueling is obstructed by the integrated central measuring cylinder is solved.
Owner:HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI

Manufacturing method of small-sized multi-core full-dry-type introduced optical cable

The invention discloses a manufacturing method of a small-sized multi-core full-dry-type introduced optical cable. The small-sized multi-core full-dry-type introduced optical cable comprises an outer sheath and an inner sheath, wherein aramid fibers are arranged on the inner side wall and the outer side wall of the inner sheath respectively, and multi-core micro-beam tubes are arranged in the inner sheath, and are arranged among the aramid fibers. The manufacturing method of the small-sized multi-core full-dry-type introduced optical cable comprises the steps that (1) a layer of aramid fibers is added to the positions among the multi-core micro-beam tubes in a reinforced mode, a rip cord is embedded into the aramid fibers in a parallel mode, (2) the inner sheath is arranged at the periphery of the multi-core micro-beam tubes in a pressing wrapping mode, (3) a layer of aramid fibers is added to the periphery of the inner sheath in a reinforced mode, a rip cord is embedded into the aramid fibers of the step (3) in a parallel mode, and (4) the outer sheath is arranged at the periphery of the aramid fibers of the step (3) in a pressing wrapping mode, and two pieces of resin fiber reinforced plastic are embedded into the outer sheath in a parallel mode. The manufacturing method of the small-sized multi-core full-dry-type introduced optical cable is simple; due to the fact that double sheaths are adopted, the mechanical property of the small-sized multi-core full-dry-type introduced optical cable is effectively ensured; due to the fact that the mode that the multi-core micro-beam tubes are used for protecting optical fibers, and water resistance yarn is used for resisting water is adopted, permeation and diffusion of moisture are effectively prevented, and reliability of an optical cable line is improved.
Owner:JIANGSU HENGTONG PHOTOELECTRIC

Major structure of dual-mode superconductive photocathode injector

InactiveCN101888737AReduce repetition rateLow emissivity and high repetition rateDirect voltage acceleratorsLow emittanceDual frequency
The invention relates to a major structure of a dual-mode superconductive photocathode injector, belonging to the technical field of accelerators. In the major structure, the QWR superconductor cavity of a low-frequency TEM mode and the high beta ellipsoidal superconductor cavity of a high frequency TM mode forms a dual-mode dual-frequency superconductor cavity, the QWR superconductor cavity and the high beta ellipsoidal superconductor cavity are connected through a beam tube, the QWR superconductor cavity is used for leading out a low-energy electron beam, the high beta ellipsoidal superconductor cavity is used for bunching and energizing the electron beam, and the frequencies of the two cavities are in frequency multiplication and synchronization relation. The electron beam produced by the invention has the advantages of ultra-short pulse, ultra-low emittance and high average current.
Owner:赵夔

Charged particle beam projection lithography with variable beam shaping

Flexibility of a charged particle (e.g. electron) beam projection lithography tool is enhanced by filling a shaping aperture with the beam, projecting the image of the shaping aperture to a reticle subfield where the image preferably corresponds in size to a "clear" or "aperture" area in a subfield of the reticle and deflecting the beam across a selected portion thereof to develop a compound image which is projected onto the target (e.g. wafer). Deflection of the shaped beam onto the reticle aperture is preferably performed electrostatically with the center of deflection coincident with the source cross-over of the charged particle beam column to avoid motion of the beam at the contrast aperture which is used, possibly together with a beam tube, to collect particles scattered where the deflected beam overlaps the patterned areas of the reticle adjacent the reticle aperture. Fabrication of new reticles is thus avoided for minor design changes by provision of direct writing for the design changes while preserving a large portion of the benefits of high throughput of charged particle beam projection of reticle patterns to the target.
Owner:NIKON CORP
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