The invention discloses a separated heating wide-range
oxygen sensor. The separated heating wide-range
oxygen sensor comprises a sensor
chip core; a heater surrounds the outer part of one end of the
oxygen sensor
chip core; the relative position between the heater and the sensor
chip core is not changed and the heater and the sensor chip core are not in contact with each other; the sensor chip core comprises a Nernst battery, a pump battery and a detection cavity which are respectively arranged on different stacked
zirconium oxide substrates. The pump battery, a closed detection cavity and theNernst battery are combined, oxygen in the cavity cannot escape or diffuse through a
closed cavity, the Nernst
voltage detection precision is higher, and the threshold value is wide. Due to the design of the external heater, the difficulty of a manufacturing process is reduced, leakage current is completely eradicated, the
measurement precision is improved, heating is uniform, consistency of allpositions is high, generation of thermal stress is reduced, and reliability is enhanced. A
diffusion barrier is not needed, and the process is simple; no
diffusion barrier material is needed, the material types are few, co-firing matching is good, and the yield is high. The structure is simple, the number of laminated
layers is small, weight is reduced, vibration resistance is enhanced, and overall reliability is enhanced.