The invention discloses a
mass spectrometer radio frequency power supply provided with a temperature compensation
system. The
mass spectrometer radio frequency power supply comprises a radio frequencyvoltage V closed-loop circuit, a
direct current amplifying module and a scanning
signal, wherein the
radio frequency voltage V closed-loop circuit sequentially comprises a
comparator, a mixer, a power
amplifier and an amplitude detection module, the scanning
signal and the output terminal of the amplitude detection module are respectively electrically connected with the input terminal of the
comparator, the output terminal of the amplitude detection module is electrically connected with the input terminal of the
direct current amplifying module by virtue of one multiplier, a temperature compensation amplifying circuit with positive and
negative temperature compensation coefficients is also arranged in the radio frequency power supply, the temperature compensation amplifying circuit also comprises a temperature compensation module provided with a temperature-sensitive element, the temperature-sensitive element is used for detecting ambient temperature T at which the radio frequency power supply works, a
data model stored with relation between the ambient temperature T and a deviation value of the radio frequency power supply is also arranged in the temperature compensation module,and the temperature compensation module dynamically adjusts the feedback quantity of the radio frequency power supply according to the working ambient temperature and the
data model. The
mass spectrometer radio frequency power supply disclosed by the invention adopts the temperature compensation module based on the temperature-sensitive element, actively solves the temperature drift problem, is high in compensation efficiency and well maintains
voltage stability of the radio frequency power supply.