The invention discloses a super-resolution microscopic imaging method and a super-resolution
microscopic imaging system based on a microcantilever and
microsphere combined probe. The
system comprises a super-resolution
microscopic imaging device which comprises the microcantilever and
microsphere combined probe, piezoelectric
ceramic, a
laser, a transflective
prism, a position sensitive element, a stepping movable table, an objective, a
charge coupled device (CCD) and the like, and a
control system which comprises a current-to-
voltage converter, a
feedback control module, a high-
voltage amplifier, a stepping controller, a computer, an interface and the like. A
microsphere is lifted off by the microcantilever and microsphere combined probe and is approximate to the surface of a sample, and an atomic-force-based micro / nano
feedback control method is adopted, so that the distance between the microsphere and the sample is controlled in a near-field range, and super-resolution optical microscopic imaging is realized. The new super-resolution microscopic imaging method based on the microcantilever and microsphere probe has the advantages that the multi-zone, full-field and super-resolution optical microscopic imaging of the sample is realized, the limit of
optical diffraction is broken, and the defects of the traditional microsphere microscopic
imaging technology in many aspects are overcome.