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1499results about "Charge supports" patented technology

Silicon gas injector and method of making

A gas injector tube usable in a batch thermal treatment oven including two silicon shells joined together with an adhesive formed of a fine silicon powder and a curable silica-forming agent, such as a spin-on glass, which is ultrasonically homogenized. The tube may have a gas outlet on its distal end or be sealed with a silicon cap and have side outlet holes formed along its side. The silicon injector tube may be used in combination with a silicon tower and a silicon liner so that all bulk parts within the furnace hot zone are formed of silicon.
Owner:INTEGRATED MATERIALS

Multilevel pedestal for furnace

A pedestal for use in a high temperature vertical furnace for the processing of semiconductor wafers provides a closure and heat insulation for the lower end of the furnace and is a wafer boat support. The pedestal, comprising quartz-enveloped insulation material, supports a wafer boat at a boat support level and is provided with an upper section disposed above the boat support level. The upper section comprises enveloped insulating material. The envelope of the upper section is also formed of quartz and the insulating material in the upper section has a lower thermal conductance than the insulating material in a lower quartz enveloped section.
Owner:ASM INTERNATIONAL

Firing jig and method for manufacturing honeycomb structure

A firing jig for a honeycomb molded body includes a housing body configured to place a pillar-shaped honeycomb molded body including silicon carbide as a main component with a side face of the honeycomb molded body facing down, and a coat layer formed on at least a placing face of the housing body configured to place the honeycomb molded body thereon. A main component of the coat layer is silicon carbide, the coat layer having an arithmetic average height Ra of about 10 μm or less obtained in conformity with JIS B 0601 (2001).
Owner:IBIDEN CO LTD
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