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4685results about "Refuse vehicles" patented technology

Dual loading port semiconductor processing equipment

A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing substrates therein. Each pod door openers having means for permitting access to the substrates inside the pod placed on a corresponding pod supporting stage.
Owner:KOKUSA ELECTRIC CO LTD
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