The invention discloses a device and method for checking SF6 gas leakage monitoring and alarming apparatuses. The device comprises precise electronic
mass flow meters, solenoids, an
air pump, a
pressure controller, a quick connector, rotor flow meters, a
control unit, a human-computer interface, a flow control valve and a connecting
pipe. The high-concentration SF6 standard gas and air are mixed by the electronic
mass flow meters and are diluted into the required SF6 standard gas with different concentrations and
oxygen so as to achieve the requirements for accuracy and
repeatability of detection of the monitoring and alarming apparatuses for checking the SF6 gas leakage. The device of the invention can avoid carrying plenty of steel cylinders for SF6 standard gases and
diluent gases, has the characteristics of simpleness, rapidness, accuracy and high degree of
automation and provides great convenience for checking the SF6 gas leakage monitoring and alarming apparatuses on site.