The invention discloses a non-contact micro-
cantilever beam rigidity measurement method based on an electrostatic force. The method comprises the following steps: establishing an experimental platform, controlling a nanometer micropositioner to drive a micro-
cantilever beam to be tested to perform periodic
equidistant stepping motion on a vertical direction, measuring a
capacitance change betweenthe micro-
cantilever beam to be tested and a
plate electrode in real time by using a
capacitance bridge, and performing mathematical treatment on the experimental data; and using a DC power source toload a periodic
equidistant stepping
voltage between the micro-cantilever beam to be tested and the
plate electrode, using a
laser interferometer to measure the displacement change of a free end of the micro-cantilever beam to be tested in real time, and performing mathematical treatment and fitting on the experimental data to obtain a rigidity measurement value of the micro-cantilever beam to betested. The non-contact micro-cantilever beam rigidity measurement method disclosed by the invention is based on the Hooke's law, the electrostatic force is used as the load, the nanometer micropositioner, the
capacitance change, a stabilized
voltage supply and the like are adopted, a micro-cantilever beam rigidity measurement platform is established, a
mathematical relationship among the micro-cantilever beam rigidity, an interelectrode
voltage and the displacement of the free end is established, and the non-contact measurement of the rigidity of the cantilever beam is achieved.