Method and device for measuring parameters of micro solid gyroscope equivalent circuit
An equivalent circuit and parameter measurement technology, which is applied in the direction of measuring devices, measuring electrical variables, measuring resistance/reactance/impedance, etc., can solve the problem of no equivalent circuit, etc., and achieve the effect of improving analyzability
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[0019] The embodiments of the present invention are described in detail below. Based on the premise of the technical solution of the present invention, the present embodiment provides detailed implementation and specific operation process, but the protection scope of the present invention is not limited to the following embodiments.
[0020] Such as figure 1 As shown, the micro-solid modal structure involved in this embodiment is very simple. The material of the substrate 5 is silicon, and high-quality glass or metal can also be selected. Its shape is a cuboid, and the specification of 4mm×5mm×3mm can be selected. The electrode material on both sides of the surface is PZT piezoelectric ceramics, and the piezoelectric effect of this material is used in the gyro vibration process. There are 16 electrodes on both sides of the surface, including driving electrodes, reference electrodes and sensing electrodes, of which 1, 9, 10, and 17 are driving electrodes, 4, 7, 11, and 15 ...
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