The invention discloses a method for purifying a silica
sol with superhigh purity in the technical field of chemical mechanical
polishing. The purification process comprises taht: strong acid type cation exchange resin, strong alkali type anion exchange resin and strong acid and strong alkali mixed-
bed resin are filled to an
ion exchange column and are subjected to regeneration treatment; the temperature of the silica
sol is controlled between 0 and 60 DEG C and inversely flows through a strong acid type cation exchange
bed; the obtained acid silica
sol inversely flows through a strong alkali type anion exchange
bed and is added with a chelator so that pH of the silica sol is between 1.0 and 3.0; and the silica sol added with the chelator inversely flows through a strong acid and strong alkali
ion exchange resin mixed bed to obtain the purified silica sol. The method has good purification effect, can obtain the silica sol of which the superhigh purity meets the requirement of the chemical mechanical
polishing, has short purification time and high efficiency, and can be used for continuous industrialized production.