The invention belongs to the technical field of vacuum adsorption, and particularly relates to a porous vacuum chuck and a preparation method thereof. The porous vacuum chuck comprises a porous adsorption part, a sealing layer and a base, wherein the porous adsorption part is fixed on the base through the sealing layer, and a penetrating through hole is formed in the middle of the base; the porousadsorption part is made of one or more of aluminum oxides, zirconium oxides, zirconia toughened alumina (ZTA), silicon carbides, silicon nitrides, zinc oxides, titanium oxides, stannic oxides, hydroxyapatite or quartz; the sealing layer is made of ceramic, glass or resin, and the thickness of the sealing layer is 10-500 microns; and the base is made of aluminum oxides, zirconium oxides, ZTA, silicon carbides, silicon nitrides, quartz, stainless steel, titanium alloys or aluminum alloys. The porous vacuum chuck is small in flow loss, stable adsorption of an adsorbate can be achieved under thecondition that the adsorbate cannot completely cover an adsorption area, and product defects such as sunken deformation cannot be caused.