The invention discloses a full-digital MEMS three-component
geophone. The full-digital MEMS three-component
geophone comprises a sealed waterproof shell, a
control unit, a three-component wave
detector, three
signal conditioning circuits and three A / D
converters, wherein the
control unit is arranged in the sealed waterproof shell, the three-component wave
detector is connected with the
control unit and composed of three uniaxial
MEMS sensors in an orthogonal mode, the three
signal conditioning circuits are connected with the three uniaxial
MEMS sensors in a one-to-one mode, and the three A / D
converters are connected with the three
signal conditioning circuits in a one-to-one mode through a multi-way
simulation selector, and the three A / D
converters are connected with the control unit. In addition, an inclination detection module and an
inertia sensor are further connected to the control unit. By the adoption of the full-digital MEMS three-component
geophone, the power supply
internal management problems that in the prior art, a wave
detector cannot consider posture method information and the multipurpose adaptability to the ground,
logging and the like at the same time, cannot obtain
internal temperature and
humidity parameters in real time and is inefficient and high in
power consumption are solved, and high practical value and research significance are achieved.