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47results about How to "Reduce work pressure" patented technology

Remote control based network-distribution conduction device for live working

The invention relates to a mounting device for an overhead line or a cable, in particular to a remote control based network-distribution conduction device for live working. The structural feature of the network-distribution conduction device comprises a pair of clamping devices, a high-voltage insulation connection wire and a remote control unit. The clamping devices in the conduction device is remotely controlled by a remote control unit so as to clamp and loosen, the operation program of an operator is simplified, a series of inconvenient and unsafe problems brought due to the local operation of the operator are avoided, and meanwhile, the operation reliability problem brought by remote distance manual operation is avoided; the work pressure of the operator is reduced, and the safe production is guaranteed; and moreover, as a speed-down motor is adopted, a balanced clamping action force is exerted to a guide line, so that the problems that the guide line is damaged due to the facts that the force exerted by manual work is uneven, and the direction is deviated, are avoided; and the radian symmetry structure of a movable jaw and a bridge-shaped fixed jaw can adapt to the surface radian of the guide line, and a good surface contact is provided, so that a positive pressure is exerted to the guide line, and the damage problem of the guide line is further solved.
Owner:STATE GRID CORP OF CHINA +2

Automatic sliding well drilling control device

The invention relates to an automatic sliding well drilling control device, and belongs to the technical field of oil drilling tool design. The automatic sliding well drilling control device is characterized by being composed of a guiding tool face angle sensor (1), a toque sensor (2), a drilling fluid pressure sensor (3), a programmable processor (4), a user input device (5), a video output displayer (6) and a drill column rotating controller (7). The programmable processor (4) is used for receiving output signals form the guiding tool face angle sensor (1), the toque sensor (2) and the drilling fluid pressure sensor (3), the output signals is processed by the programmable processor (4) and the received information and a processing result are displayed on the video output displayer (6). After the programmable processor (4) processes the received information, the programmable processor (4) outputs a control instruction to the drill column rotating controller (7) and controls the drill column rotating controller (7). According to the automatic sliding well drilling control device, a tool face can be modified and oriented fast and accurately, the conversion between the sliding and the rotating drilling is fast, the drilling ability in a horizontal section is enhanced, and the automatic sliding well drilling control device has the advantages that mechanical drilling speed is increased, well track quality is improved, and the service life of a motor under a well is prolonged.
Owner:YANGTZE UNIVERSITY

Water lifting and supporting device

InactiveCN104925709AReduce the impactReduce pressure difference between inside and outsideWaterborne vesselsLifting devicesMaterial resourcesEngineering
The invention discloses a water lifting and supporting device. The device comprises a table type supporting table, guide rails, air bags, a gas pipe and a gas control unit. The table type supporting table comprises a table board and supporting pipes located on the lower portion of the table board; one end of each supporting pipe is fixedly connected with the table board, and a pipe hole is formed in the position, corresponding to the table board, of each supporting pipe; the guide rails stretch into the supporting pipes through the pipe holes and stretch out of the other ends of the supporting pipes; blocking pieces are welded to the upper ends of the guide rails, and the air bags are located on the inner sides of the supporting pipes; the bottoms of the air bags are connected with the supporting pipes through ropes, and springs are connected between the air bags and the bottom of the table board; the gas control unit is fixedly connected with the upper ends of the guide rails, and the gas inlet end of the gas control unit is connected with a gas pump through the gas pipe; and the gas outlet end of the gas control unit is connected with air inlets of the air bags through the gas pipe. The water lifting and supporting device is mainly applied to indoor small and narrow environments with pools, launching and water output operation of heavy objects can be rapidly and conveniently achieved, and manpower and material resources are saved.
Owner:中国科学院自动化研究所(洛阳)机器人与智能装备创新研究院

Radioactive drug micro-radiation sub-packaging device

InactiveCN109896054ARealize mixing and dispensingAvoid wearingSolid materialPackaging machinesWorking pressureMedicine
The invention relates to the technical field of radioactive drug sub-packaging, in particular to a radioactive drug micro-radiation sub-packaging device. The radioactive drug micro-radiation sub-packaging device comprises a shell body, wherein the shell body is provided with an upper cavity body and a lower cavity body through a partition plate, an opening and closing door mechanism, a sliding mechanism, a clamping mechanism, a cover taking mechanism, a medicine taking mechanism, a medicine tray mechanism and a cleaning mechanism are arranged in the shell body according to the sub-packaging steps. According to the radioactive drug micro-radiation sub-packaging device, different mechanism are mutually matched in the closed shell, so that the automatic sub-packaging of radioactive drugs andthe mixed separation of the different radioactive drugs are realized, the method is efficient and simple, medical workers can be prevented from wearing protective clothing, the manual sub-packaging tedious steps can be reduced, the sub-packaging efficiency can be improved, the mechanical electrification control can be realized, the distribution of the accurate radioactive drugs is realized, and the working pressure of the medical workers is reduced; and meanwhile, bottle caps are installed, fixed and taken out from the device, the whole process almost has the effect of reducing external bacterial infection and sub-packaging drugs in a closed environment.
Owner:CHANGZHOU NO 2 PEOPLES HOSPITAL

Molasses addition system of mixer and molasses addition technology of molasses addition system

The present invention discloses a novel molasses addition system of a mixer and a molasses addition technology of the molasses addition system, and belongs to the fields of molasses addition devices and production technology for feed processing. The molasses addition system includes raw material tanks, a dilution tank, a storage tank, a metering unit and a nozzle, which are connected through pipelines in a sealed manner. Each raw material tank includes a raw material tank body, a heating coiled pipe, and a feeding pipe, wherein a discharging port of the raw material tank is connected with a feeding port of the dilution tank. The dilution tank includes a dilution tank body, a heating coiled pipe, a water inlet pipe and a stirrer, wherein the water inlet pipe is connected to the upper portion of the dilution tank body, the stirrer is located in the center of the dilution tank body and passes through the heating coil pipe, and a discharging port of the dilution tank body is connected with a feeding port of the storage tank. The storage tank comprises a storage tank body, a heating coil pipe, and a stirrer, wherein the stirrer is located in the center of the storage tank body and passes through the heating coil pipe, and a discharging port of the storage tank is connected with the metering unit. The molasses addition system can automatically and precisely control the mixing ratio of water and molasses, and can accurately set the amount of diluted molasses based on the amount of materials in the mixer and exactly add the molasses.
Owner:HUNAN JIUDING TECH (GRP) YONGZHOU DINGLI FEED CO LTD

Autonomous object interconnecting concentrator and autonomous transmission method of data

The invention relates to an autonomous object interconnecting concentrator and an autonomous transmission method of data. The autonomous object interconnecting concentrator comprises a periodic control module and a data processing module, wherein the periodic control module is used for periodically transmitting collection starting signals respectively to multiple sensors; the data processing module is used for receiving collection data sent back by each sensor and screening collected data respectively according to a preset judgment expression, and multiple collected data, which pass screening,are sent to an upper computer or a server. The autonomous object interconnecting concentrator is used for transmitting the collection starting signals to the sensors, active type data collection specific to the sensors is realized by the autonomous object interconnecting concentrator, the work operation pressure of the upper computer or the server is alleviated, and meanwhile, the downward communication width requirement from the upper computer or the server to the autonomous object interconnecting concentrator is reduced.
Owner:李长云

Long-term nursing insurance realization method based on block chain, storage medium and device

The invention provides a long-term nursing insurance realization method based on a block chain, a storage medium and device. The method comprises the following steps: establishing a long-term nursinginsurance service block chain; automatically distributing the basic information of the insurers who do not collect the physical signs on the long-term nursing insurance service block chain to a manager collection personnel terminal; The administrative organization acquisition personnel terminal acquires physical sign data of the insured person according to the basic information of the insured person; Unrated insurer basic information and the sign data on the long-term nursing insurance service block chain are automatically distributed to a manager rating personnel terminal; the administrativeorganization rating personnel terminal calculates a rating result according to the basic information of the insured person and the sign data; and applying for a long-term nursing service according tothe rating result. The safety and traceability of the long-term nursing insurance service are ensured, the sharing is clear, the objectivity and accuracy of the rating result are ensured, and the userexperience is improved.
Owner:易保互联医疗信息科技(北京)有限公司

Metal plasma source and application thereof

InactiveCN105543791AReduce electron escapeReduce working pressureVacuum evaporation coatingSputtering coatingIonizationHollow cylinder
The invention discloses a metal plasma source and application thereof. The metal plasma source comprises a shell, magnetic control targets, magnetic elements and inhibition magnetic elements, wherein the shell is of a hollow cylinder shape; the magnetic control targets are paved in a hollow inner cavity of the shell and is not communicated with the shell; the magnetic elements are paved between the magnetic control targets and the shell; the inhibition magnetic elements are mounted at two ends of the magnetic element in pairs and are the same as end polarity of the magnetic elements. According to the metal plasma source, the inhibition magnetic elements are mounted at two ends of the magnetic elements; a magnetic field formed by the inhibition magnetic elements is used for pushing magnetic lines which are tilted outwards of the magnetic elements back to form an arched magnetic field vertical to the magnetic control targets, so that the electron escape is reduced; more electrons are restrained in the plasma source; the effect of reducing the working pressure is achieved; the purposes of improving the target etching uniformity, controllability and beam current density can be achieved; meanwhile, the electron concentration in the metal plasma source is increased; and the ionization rate and the beam current density of the material can also be effectively improved.
Owner:PEKING UNIV SHENZHEN GRADUATE SCHOOL

Nanofluid for thermodynamic solar system

Solar concentration system with thermo-vector fluid made up of gas-based nanofluids and with suitably shaped receiver element of the solar radiation.
Owner:UNIV DEL SALENTO - DIPARTIMENTO DI INGEGNERIA DELLINNOVAZIONE

Micro-channel radiator and manufacturing method thereof

The invention discloses a micro-channel radiator structure which comprises a cover plate which is provided with a working medium inlet and a working medium outlet; a metal base which is arranged belowthe cover plate in a sealing manner; a first micro-channel structure which is arranged in the cover plate and the metal base sealing body in the first direction; a second micro-channel structure which is arranged in the cover plate and the metal base sealing body in the second direction and is communicated with the first micro-channel structure, the working medium inlet and the working medium outlet; and a micro-channel shunting structure which is arranged in the cover plate and the metal base sealing body and is communicated with the first micro-channel structure.
Owner:SHANGHAI JIAO TONG UNIV

BTM detection base station system and detection method

The invention belongs to the technical field of railway signal equipment detection, and particularly relates to a BTM detection base station system and detection method. The system comprises a trackside cabinet unit installed on a trackside installation foundation; a frequency spectrum detection unit installed on a track center sleeper and used for receiving radio frequency signals transmitted bya BTM antenna; a laser height measurement unit installed on a track center sleeper and used for detecting installation height data of the BTM antenna; a wheel sensor installed on steel rails of a track and used for obtaining arrival signals of a running train; and a BTM antenna receiving sensitivity detection unit mounted on the track center sleeper, and is used for detecting whether an uplink index of BTM antenna receiving sensitivity is normal or not in combination with vehicle-mounted DMS system closed-loop detection. According to the invention, the performance of BTM equipment can be comprehensively detected, the hidden danger of the performance of the equipment can be discovered in time, and the detection efficiency and accuracy are improved, so that the overhaul operation pressureof overhaul personnel in an electric service work area is reduced.
Owner:HENAN LANXIN TECH

Cationic resin catalyst, preparation method thereof and catalytic application thereof in preparation of glycolic acid by methyl glycolate hydrolysis method

The invention provides a cationic resin catalyst, a preparation method thereof and a catalytic application of thereof in preparation of glycolic acid by a methyl glycolate hydrolysis method. The cationic resin catalyst is prepared from styrene as a monomer and divinylbenzene as a cross-linking agent, the styrene and the divinylbenzene are copolymerized with a pore-forming agent, an initiator and adispersing agent to prepare copolymer white balls, the copolymer white balls are subjected to pore purification and sulfonation to prepare the cationic resin catalyst, wherein the mass ratio of the styrene to the divinylbenzene is 100:7, the mass ratio of the pore-forming agent to the initiator is 1: (0.05-0.3) : (0.005-0.03), and the ratio of the total mass of the styrene, divinylbenzene, pore-forming agent and initiator to the weight of the dispersing agent is 1: (3-4). The catalytic application of the methyl glycolate hydrolysis method for preparing glycolic acid in a catalytic distillation tower has the advantages of short process flow, complete hydrolysis of the methyl glycolate, improvement of the conversion rate of the methyl glycolate, overcoming the technical problem of reverse decomposition of the glycolic acid, long service life of the catalyst and low energy consumption.
Owner:丹东明珠特种树脂有限公司

Pneumatic tube needle installation machine

InactiveCN104786187AHave the ability to self-produceSave materialMetal-working hand toolsLiquid-crystal displayEngineering
The invention relates to a pneumatic tube needle installation machine. The pneumatic tube needle installation machine is characterized by comprising a rack, fixing grooves, a sliding push ruler, fixing screws, a sliding support, bearings, a lower file, an upper file, guide rails, a working table, a transmission rod, a pneumatic device, air guiding pipes and assembling screws, wherein power is provided by the pneumatic device to push the sliding support to impact with the rack along the guide rails so that tube needles fixed to the rack and a liquid crystal display fixed to the sliding support can be clamped together, and meanwhile the redundant parts of the tube needles are cut off by means of the dislocation caused when the upper file and the lower file impact with each other. According to the pneumatic tube needle installation machine, the redundant parts of the tube needles can be cut off when the tube needles are installed for the liquid crystal display, power is supplied through pushing of the pneumatic device instead of the general manual pushing, production efficiency is improved, and the workload is reduced.
Owner:NANJING LINGYA AUTOMOBILE TECH RES INST

Preparation method and preparation system for obtaining triisobutene by C4 composite oil

The application provides a preparation method and a preparation system for obtaining triisobutene by C4 composite oil. The method for preparing the triisobutene comprises the following steps: separating light components of the C4 composite oil and C8; then mixing the separated C8 with isobutene-containing hybrid C4, and carrying out preparation reaction of copolymerization C12; separating the light components, the C8 and the C12 to obtain the triisobutene of the C12. A system device of the preparation system comprises a copolymerization part and a separation flow part consisting of a lightlowcomponent removal tower, a C8 rectification tower and a C12 rectification tower. According to the technical scheme, the technical difficult problems of difficult preparation of the triisobutene, highprocess cost, low purity and low yield are solved.
Owner:丹东明珠特种树脂有限公司

Autonomous sensor and data autonomous transmission method

The invention relates to an autonomous sensor and a data autonomous transmission method. The autonomous sensor comprises a periodic control module, a data collection module and a data processing module, wherein the periodic control module is used for periodically sending a collection start signal to the data collection module; the data collection module is used for receiving the collection start signal, collecting data and sending collected data to the data processing module; and the data processing module is used for receiving the collected data and performing screening on the collected dataaccording to a threshold condition, and sending collected data that pass through the screening to an upper computer. According to the autonomous sensor and the data autonomous transmission method, with the periodic control module, passive transmission of the sensor is changed into active transmission, so the upper computer or a server is prevented from frequently sending the collection start signal of the sensor, and the work operating pressure of the upper computer or the server is alleviated; and meanwhile, the transmission data volume between the sensor and the upper computer or the serveris reduced.
Owner:李长云

Atmospheric pressure on-site ion source device and working method thereof

The invention provides an atmospheric pressure on-site ion source device and a working method thereof. The ion source device comprises a first cavity, a discharging device and a second cavity. The first cavity is provided with an inlet and is internally hollow. The discharging device is arranged in the first cavity. The second cavity is internally hollow and communicated with the first cavity. The inner diameter ratio of R1 of the first cavity to R2 of the second cavity is larger than or equal to 1.5 and smaller than or equal to 20. An outlet of the second cavity serves as an ion outlet. The inner diameter is the diameter of the smallest circle of the section which covers the cavity and is perpendicular to the axial direction. A product d*P of the depth d in the first cavity and the pressure intensity P of gas is larger than or equal to 1m Pa and smaller than or equal to 20m Pa. The ion source device has the advantages of being stable in discharging, good in repeatability, high in spatial resolution and sensitivity, capable of analyzing low-concentration samples, and the like.
Owner:NINGBO UNIV

Sock shaping and fixing apparatus

A sock shaping and fixing apparatus comprises a track, a blower structure, a driving device, a driving chain mechanism and an awaiting mechanism. Compared with present sock shaping and fixing apparatuses, the apparatus has the advantages of reasonable structure design, realization of effective utilization of the space, and convenience in maintenance. A cutting and fixing chamber reduces the vertical height of the sock shaping and fixing apparatus, reduces the work focus, increases the work stability, and is convenient to transport and maintain; the force bearing mode of the driving device is changed, so an original sealing structure is prevented, the workers' working space is increased, and the internal of the sock shaping and fixing apparatus is convenient to monitor and maintain; the awaiting mechanisms prolongs the workers' working time, reduces the working proficiency requirement and the workers' working pressure and reduces the enterprises' cost; and the driving chain mechanism increases the running stability of a driving chain and prolongs the service life.
Owner:浙江容易富机械科技有限公司

Environment-friendly control technology for tail water of sandstone factory

The invention discloses an environment-friendly control technology for tail water of a sandstone factory. The environment-friendly control technology comprises the following steps of (1) washing of sandstone: washing the sandstone for building engineering, and collecting the tail water after washing; (2) separating and concentrating: separating and settling the tail water in step (1) by concentrating equipment, producing mud containing fine particles and siltized matter and primary clean water, conveying the mud into dewatering equipment of a press filter to make cakes, and returning the primary clean water back to a water supply system for further use; (3) primary dewatering and cake making: dewatering the settled mud in step (2) for the first time by a primary belt type press filter, andproducing primary dewatering mud cake and secondary clean water; (4) secondary dewatering and cake making: dewatering the primary dewatering mud cake in step (3) for the second time by a secondary belt type press filter, and producing secondary dewatering mud cake and secondary clean water; selecting a land for the secondary dewatering mud cake, storing for further use, and returning the secondary clean water back to the water supply system for further use. The environment-friendly control technology has the advantage that the pollution to the environment by the tail water and the occupationof land resources are fundamentally eliminated.
Owner:乔静梅

Chinese herbal medicine residue recycling process

The invention discloses a Chinese herbal medicine residue recycling process, belongs to the field of extraction application of Chinese herbal medicines, and aims to provide the Chinese herbal medicine residue recycling process which is capable of efficiently recycling ethyl alcohol and petroleum ether in the medicine residue. The invention adopts the technical scheme that the recycling process comprises the following steps: step 1), pouring Chinese herbal medicine residue into a stirring tank, heating the Chinese herbal medicine residue through a heating coiled pipe in the stirring tank, wherein the heating temperature is 70-100 DEG C; step 2), under the condition of the step 1), stirring the Chinese herbal medicine residue through stirring paddles in the stirring tank under the driving of an electromotor at the speed of 20-35 rad / min; step 3), under the condition of the step 1) and step 2), reducing the working pressure in the stirring tank through a sucking pump to enable the working pressure in the stirring tank to be 0.08-0.15 MPa; step 4), after the step 1), the step2) and the step 3) are finished, enabling a pre-extraction gas to be produced in the stirring tank; step 5), introducing the pre-extraction gas produced in the step 4) into a cooler condenser; step 6), cooling the pre-extraction gas under the action of a cooling coiled pipe in the cooler condenser.
Owner:温州市凯杰药机有限公司

Double-lifting-pin lifting tool for avoiding flat rack container dropping accident

InactiveCN105523468AAdded locking conditionReduce false latch-upLoad-engaging elementsSpin locksEngineering
The invention relates to a double-lifting-pin lifting tool for avoiding a flat rack container dropping accident. The double-lifting-pin lifting tool comprises a tapered end, a spin lock arranged on a container body and two lifting pin mechanisms, wherein the spin lock is provided with the two lifting pin mechanisms located on positions symmetrical relative to the central line of the tapered end to form a double-lifting-pin structural form; and a detecting and limiting device is arranged beside each lifting pin mechanism and is connected in series with each lifting pin in a limiting way to realize interlocking control. Each lifting pin mechanism comprises a lifting pin, a limiting induction block, a guide fixed block and a spring, wherein the upper part of the lifting pin passes through an upper container body, the lifting pin is provided with the guide fixed block and the limiting induction block, a step-link shaft at the lower part of the lifting pin is provided with the spring and is locked and fixed by using a nut, one end of the spring is in contact connection with the upper container body, and the other end of the spring is in contact connection with a boss of the step-link shaft of the lifting pin. Due to the additional arrangement of implantation pins of a tyre crane lifting tool and an implantation limiting method, the locking condition of a mounted / dismounted flat rack container of the tyre crane lifting tool is increased, the occurrence rate of error locking is reduced, and the operation safety rate and operation efficiency of equipment are increased.
Owner:SHANGHAI INTERNATIONAL PORT

House viewing schedule arrangement method and device based on natural language processing technology

The embodiment of the invention provides a house viewing schedule arrangement method and device based on a natural language processing technology. The method comprises: receiving request information which is inputted by a user terminal and is described by a natural language, and judging the type of the request information; if it is known that the request information is offline to-be-viewed requestinformation, carrying out field identification, and extracting identified house viewing information fields including house viewing time and meeting places; matching agents whose house checking time is in an idle state according to the house checking time; and generating house viewing schedule arrangement information according to the house viewing time, the meeting place and the broker information, and feeding back the house viewing schedule arrangement information to the user terminal. According to the house viewing schedule arrangement method and device based on the natural language processing technology, automatic offline house viewing schedule arrangement is achieved, the communication efficiency of brokers and users is improved, the operation pressure of the brokers is relieved, and better house finding experience is provided for the users.
Owner:BEIKE TECH CO LTD

Distribution network live work drainage device based on remote control

The invention relates to a mounting device for an overhead line or a cable, in particular to a remote control based network-distribution conduction device for live working. The structural feature of the network-distribution conduction device comprises a pair of clamping devices, a high-voltage insulation connection wire and a remote control unit. The clamping devices in the conduction device is remotely controlled by a remote control unit so as to clamp and loosen, the operation program of an operator is simplified, a series of inconvenient and unsafe problems brought due to the local operation of the operator are avoided, and meanwhile, the operation reliability problem brought by remote distance manual operation is avoided; the work pressure of the operator is reduced, and the safe production is guaranteed; and moreover, as a speed-down motor is adopted, a balanced clamping action force is exerted to a guide line, so that the problems that the guide line is damaged due to the facts that the force exerted by manual work is uneven, and the direction is deviated, are avoided; and the radian symmetry structure of a movable jaw and a bridge-shaped fixed jaw can adapt to the surface radian of the guide line, and a good surface contact is provided, so that a positive pressure is exerted to the guide line, and the damage problem of the guide line is further solved.
Owner:STATE GRID CORP OF CHINA +2

River sludge treatment device

The invention discloses a river sludge treatment device which comprises a working box. A supporting base is fixedly connected at the bottom end of the working box, a machine top box is fixedly connected at the upper end of the working box, a control panel is fixedly connected on the front surface of the working box, a power socket is fixedly connected on the left lower portion of the control panel, a maintenance door is movably connected on the front surface of the machine top box, a warm air machine is fixedly connected in the machine top box, an air outlet pipe is fixedly connected at the lower end of the warm air machine, a sludge storage box is movably connected on the lower portion of the air outlet pipe, the device is provided with an oscillation machine, so that sludge storage box can be oscillated through a spring, curing efficiency can be effectively increased, curing degree of sludge is higher, the warm air machine can effectively provide necessity energy for curing of the sludge, curing speed is higher, and the oscillation frequency of the oscillation machine can be effectively buffered by the spring, so that the oscillation frequency is reasonable and effective. The device is simple in structure and convenient to use.
Owner:杨程飞扬

Wet-process phosphoric acid extraction tower cleaning method

ActiveCN113020064APromote full accessReduce security management costsCleaning using liquidsO-Phosphoric AcidEngineering
The invention discloses a wet-process phosphoric acid extraction tower cleaning method. The method comprises the following steps of performing high-pressure water physical cleaning on the interior of an extraction tower, and opening a channel in dirt; performing chemical cleaning on the interior of the extraction tower by adopting a cleaning solution with the temperature of 70 DEG C or above, and controlling the pressure intensity of the cleaning solution to be 0.05 MPa or above in the chemical cleaning process, so that the hard scale is converted into soft scale; and performing high-pressure water physical cleaning on the interior of the extraction tower, so that soft dirt falls off and is discharged outwards, and finishing cleaning of the extraction tower. The cleaning method has the advantages of being short in cleaning period, low in cleaning cost, high in cleaning efficiency, good in cleaning effect, safe, environmentally friendly and the like, efficient and thorough cleaning of the wet-process phosphoric acid extraction tower can be achieved, the use value is high, and the application prospect is good.
Owner:湖南瑞寰环境科技有限公司

A kind of plasma sputtering coating method

The invention discloses a novel plasma sputtering coating method. A device is composed of a control system, a high-voltage energy storage unit, a low-voltage energy storage unit, a negative polarity high voltage preionization pulse circuit, a double polarity low voltage main pulse circuit, a pulse fusion circuit and a plasma load. The design method of high voltage short pulses on plasma preionization and high power double polarity pulse magnetron sputtering is provided, the plasma load is subjected to multiple times of high voltage short pulse preionization and high power double polarity pulseelectric field treatment according to a certain repetition frequency, the time internal between negative polarity high voltage short pulses and high power positive and negative double polarity low voltage main pulses is reduced, and thus coupling between voltage pulses and the plasma load is enhanced, and the problem that the ionization moments of target materials are inconsistent is solved. Thewidth and voltage amplitude of negative polarity high voltage short pulses can be adjusted according to different sputtering target materials and plasma gases, the working pressure of gases in the magnetron sputtering device can be reduced, low-pressure sputtering coating is achieved, the deposition rate of particles is improved, and the surface roughness of a film is reduced.
Owner:INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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