The invention discloses an ultrasonic receiving
transducer based on a Helmholtz
resonant cavity. The ultrasonic receiving
transducer based on the Helmholtz
resonant cavity comprises the Helmholtz
resonant cavity and an MEMS piezoelectric ultrasonic
transducer which are combined through bonding, wherein the MEMS piezoelectric ultrasonic transducer is composed of a piezoelectric laminated structureand a
silicon substrate with a cavity body, the Helmholtz resonant cavity is composed of a
silicon structure with a cavity body and an upper opening, the
silicon structure is located above the piezoelectric laminated structure, a Helmholtz resonant cavity hole is formed in the upper opening, and air in the Helmholtz resonant cavity hole forms an air column of the Helmholtz resonant cavity; the middle part of the silicon substrate structure with the cavity body and at the bottom is etched to form a bulged silicon substrate strut, an annular groove is etched in the piezoelectric laminated structure around the silicon substrate strut, a plurality of radial grooves are etched in the piezoelectric laminated structure by taking the silicon substrate strut as a center, and the piezoelectric laminated structure is partitioned into a plurality of fan-shaped structures or a plurality of trapezoidal structures; and the plurality of fan-shaped structures or the plurality of trapezoidal structuresform a
cantilever beam, one end, making contact with the silicon substrate strut, of the
cantilever beam, forms a fixed end, and one end, away from the silicon substrate strut, of the
cantilever beam,forms a free end. The performance of the ultrasonic receiving transducer can be improved.