The invention provides a micro electro
mechanical system (MEMS) device and a manufacture method of the MEMS device. The device comprises a first interlayer
dielectric layer, a cavity, an opening combination, an MEMS movable
electrode, a second interlayer
dielectric layer, a third opening and a third interlayer
dielectric layer, wherein the first interlayer
dielectric layer is positioned on a
semiconductor substrate, the cavity is positioned in the first interlayer
dielectric layer, the opening combination is positioned in the first interlayer
dielectric layer arranged above the cavity, is communicated with the opening combination and comprises a first opening and a second opening, the side walls of the first opening and the second opening are not aligned, a lug boss is formed between the first opening and the second opening and is exposed out by the second opening, the MEMS movable
electrode is suspended and placed in the cavity and can move relative to the cavity, the second interlayer dielectric layer is positioned on the first interlayer dielectric layer, the third opening is positioned in the second interlayer dielectric layer and is communicated with the opening combination, in addition, the position of the third opening does not exceed the position of the lug boss, and the third opening is fully filled by the third interlayer dielectric layer. The obtained MEMS device can normally work, and the reliability of the MEMS device is improved.