The invention discloses a detection device and a detection method for internal defects of a
silicon wafer. The detection device comprises a detection module shell forming a
darkroom, wherein the front of the detection module shell is provided with an operating board, and the detection module shell is provided with a
test frame; the detection device further comprises a probe adjusting module, a line
light source adjustment module, a loading conveying platform, an unloading conveying platform, and a necessary
electrical control circuit and a power supply. The probe adjusting module can carry out three-dimensional spatial adjustment, including up-down adjustment, left-right adjustment, front-back adjustment and rotation angle adjustment, on a probe, and is fixed on the upper part of the
test frame; the line
light source adjustment module carries out three-dimensional spatial adjustment, including up-down adjustment, left-right adjustment, front-back adjustment and rotation angle adjustment, on the line
light source, and is fixed at the lower part of the
test frame; and the upper loading conveying platform and the lower unloading conveying platform are fixed on the detection module shell via a bracket. The detection device and the detection method can be used for breaking through the condition of uneven outgoing quality of the wafers in the past, and greatly reducing a series of defects of the wafers caused by the quality problem.