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110results about How to "Compensation for deformation" patented technology

Exposure device and exposure method

The invention relates to an exposure device and an exposure method, capable of exposing and transferring a microfine exposure pattern on a substrate by using a micro lens array with high resolution at relatively short production takt interval. The exposure device of the invention comprises a mask loading platform (10); a substrate loading platform (20); an illuminating optical system (3) for irradiating lights for pattern exposure; a micro lens carrying plate (62), which has a micro lens array (41) that is formed by directional configuration of multiple micro lenses (42) on a plane and is extended in a linear manner along the Y direction, and is configured between a mask (M) and the substrate (W); and a micro lens driving mechanism (60) for enabling the micro lens carrying plate (62) to move along the X direction. When the micro lens carrying plate (62) moves along the X direction, lights for pattern exposure are irradiated to expose and transfer the mask pattern on the substrate (W) with the help of the micro lens (42).
Owner:NSK TECH

Continuously variable transmission, endless flexible belt for torque transmission and adjustable pulley

A continuously variable transmission, provided with two adjustable pulleys, each pulley comprising a pair of mutually displaceable essentially frusto-conical pulley sheaves having a radial dimension provided on a pulley shaft, each sheave having a sheave face, whereby the sheave faces of a pulley are mutually oriented at a pulley angle, and with an endless flexible belt for transmitting torque comprising two lateral side faces, which are mutually oriented at a belt angle (alpha) such that the flexible belt tapers radially inwardly and which are intended for interacting with the sheave faces of a pulley under the influence of a clamping force to be exerted on the flexible belt by the sheaves. The belt angle is marginally, but notionally, larger than the pulley angle (beta) of at least one pulley for at least a substantial part of the radial dimension of the pulley sheaves.
Owner:VAN DOORNES TRANSMISSIE BV

Optical proximity correction method for contact hole graphic design

The invention provides an optical proximity correction method for contact hole graphic design, and the method comprises the following steps: providing a design layout with contact hole graph; implementing a first optical proximity correction for the contact hole figure in the design layout; determining whether the contact hole figure after the first optical proximity correction satisfies the requirement of mask layer rule examination, if the contact hole figure does not satisfy the requirement of mask layer rule examination, implementing a second optical proximity correction for the contact hole figure which is processed by the first optical proximity correction, and simultaneously adding another figure between the contact hole figures which are processed by the first optical proximity correction, and thereby connecting the two adjacent contact hole figures for forming a figure unit; carrying out a photoetching projection simulation for the figure unit. According to the invention, the optical proximity correction for the contact hole figure is not limited by the mask layer rule examination, and thereby the corrected contact hole figure can completely compensate the deformation of the contact hole figure caused by interference and diffraction of light during photoetching simulation.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Hard sealing double eccentric butterfly valve for S-shaped elastic double O-shaped metal sealing ring

The invention discloses a hard sealing double eccentric butterfly valve for an S-shaped elastic double O-shaped metal sealing ring, which comprises a double eccentric butterfly plate, a valve body and a valve rod and is characterized in that the S-shaped elastic double O-shaped metal sealing ring is placed between the double eccentric butterfly plate and the valve body, and a regulation mechanism consisting of a pressing ring, a control ring, a positioning plate, a regulating screw bolt and a retainer ring is arranged at the sealing ring part. The S-shaped elastic double O-shaped metal sealing ring structure is adopted, so the problem of complicated sealing structures or single static sealing design structures caused by the dynamic and static sealing coupling is effectively solved, and the sealing structure is simplified. The sealing ring part is provided with a regulating structure, the elastic deformation quantity and the deformation direction of large and small elastic O-shaped metal sealing rings can be simultaneously regulated, the elastic deformation quantity and the elastic force can be effectively provided, the reliability of the sealing performance is improved, the deformation caused by the heat expansion and cold contraction of materials can be obviously and perfectly compensated particularly in high and low temperature application occasions with sharp temperature change, and the internal sealing performance of the butterfly valve is ensured.
Owner:704TH RES INST OF CHINA SHIPBUILDING IND CORP

Immersion projection micro steriolithography

A method for high resolution projection micro stereolithography for 3-D printing comprising: generating a 3D digital model of the sample to be printed in a computer, slicing the digital model into a sequence of images, wherein each of the images of the sequence represents a layer of the 3D digital model, positioning a transparent printing head relative to a resin vat containing a photo-sensitive resin, moving the transparent printing head into position for selectively exposing the photosensitive resin, sending an image from the sequence of images to a LCD or DLP chip, and together with a light source projecting the image through a lens onto the flat tip of the transparent printing head to initiate cure of the photosensitive resin in areas where the projected image allows light from the light source to reach the photosensitive resin.
Owner:BMF NANO MATERIAL TECH CO LTD
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