6252results about "Gear teeth" patented technology

An improved pad and process for polishing metal damascene structures on a semiconductor wafer. The process includes the steps of pressing the wafer against the surface of a polymer sheet in combination with an aqueous-based liquid that optionally contains sub-micron particles and providing a means for relative motion of wafer and polishing pad under pressure so that the moving pressurized contact results in planar removal of the surface of said wafer, wherein the polishing pad has a low elastic recovery when said load is removed, so that the mechanical response of the sheet is largely anelastic. The improved pad is characterized by a high energy dissipation coupled with a high pad stiffness. The pad exhibits a stable morphology that can be reproduced easily and consistently. The pad surface resists glazing, thereby requiring less frequent and less aggressive conditioning. The benefits of such a polishing pad are low dishing of metal features, low oxide erosion, reduced pad conditioning, longer pad life, high metal removal rates, good planarization, and lower defectivity (scratches and Light Point Defects).

A knife-edge conditioning apparatus comprises at least one precision angled knife guide with one face of the knife blade maintained in sustained sliding or rolling contact and which guides the elongated edge of the blade into sustained contact with the hardened surface of an object and positions the plane of the adjacent edge facet at a precise predetermined angle relative to the contact plane of the hardened surface made of a material of equal or greater hardness than the metal of the knife blade without any tendency to abrade as the blade face is moved along the guide with its elongated edge in sustained contact with the hardened surface.

This invention describes improved polishing pads useful in the manufacture of semiconductor devices or the like. The pads of the present invention have an advantageous hydrophilic polishing material and have an innovative surface topography and texture which generally improves predictability and polishing performance.

A method for producing titanium powder containing a solid-soluted nitorogen comprises the step of heating titanium powder comprised of titanium particles in a nitrogen-containing atmosphere to dissolve nitrogen atoms and form a solid solution of nitrogen atom in a matrix of the titanium particle.

Superabrasive tools and their methods of manufacture are disclosed. In one aspect, a method of improving retention of superabrasive particles held in a solidified organic material layer of an abrading tool, a portion of each of said superabrasive particles protruding out of the solidified organic material layer is provided. The method may include securing a plurality of superabrasive particles in the solidified organic material layer in an arrangement that minimizes mechanical stress impinging on the protruding portion of any individual superabrasive particle when used to abrade a work piece. As an example, the arrangement of the plurality of superabrasive particles may be configured to uniformly distribute frictional forces across substantially each superabrasive particle.