A tool for polishing objects having a wide variety of materials and shapes including precision optical surfaces, injection mold inserts, and thin film coating dies. The tool has an elastic solid bladder with a curved surface, upon which is disposed an abrasive band. The curved bladder surface is produced by compressing the bladder between two parallel plates. The apparatus comprises a multi-axis computer controlled machine to which the tool is attached.
An abrasive sheet dispenser for aligning and attaching hook and loop backed abrasive sheets onto abrading tools, which utilize vacuum holes incorporated into the backup pad and into its corresponding abrasive sheet. In a preferred embodiment, the dispenser has an injection molded universal base having a plurality of guide hole locations. Each group of guide hole locations is connected by a guide screw channel. The dispenser has a plurality of injection mold guides and a plurality of guide screws. The guides are of a height as to support a plurality of abrasive sheets and fastened onto the universal base by inserting the guide screws through the guide holes in the universal base from underneath and screwing into the bottom center of guides. The guides are adjustable allowing them to be aligned with various vacuum hole patterns and sizes of abrasive sheets by sliding each guide along the guide screw channel to another guide hole location within that group. The dispenser also has an injection molded clear acrylic universal cover plate, which is placed over the stack of abrasive sheets as a protective dust and moisture cover.
A method and apparatus for releasably attaching a planarizing medium, such as a polishing pad, to the platen of a chemical-mechanical planarization machine. In one embodiment, the apparatus can include several apertures in the upper surface of the platen that are coupled to a vacuum source. When a vacuum is drawn through the apertures in the platen, the polishing pad is drawn tightly against the platen and may therefore be less likely to wrinkle when a semiconductor substrate is engaged with the polishing pad during planarization. When the vacuum is released, the polishing pad can be easily separated from the platen. The apparatus can further include a liquid trap to separate liquid from the fluid drawn by the vacuum source through the apertures, and can also include a releasable stop to prevent the polishing pad from separating from the platen should the vacuum source be deactivated while the platen is in motion. In another embodiment, a signal can be applied to the platen to draw the polishing pad toward the platen via electrostatic or electromagnetic forces. In still another embodiment, the polishing pad can be attached to a pad support and conditioned on a separate jig.