Method for grinding soft crisp functional crystal
A grinding and functional technology, applied in machine tools, metal processing equipment, grinding/polishing equipment, etc. suitable for grinding workpiece planes, which can solve the residual stress of plastic deformation, micro-scratch, surface soft and brittle functional crystal embedding, etc. problem to avoid scratches
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[0011] The specific embodiments of the present invention will be described in detail below in conjunction with the technical solutions and accompanying drawings.
[0012] Adopt VG401MKII end face ultra-precision grinding machine. with Cd 0.96 Zn 0.04 Te(110) is used as a soft and brittle functional crystal sample, the sample size is 10mm×10mm×1.5mm, and the infrared light transmittance is >60%. The workpiece is fixed with a vacuum ceramic suction cup, and the diameter of the small hole of the vacuum suction cup is 0.2mm. First, use #3000 diamond grinding wheel for rough grinding, the grinding wheel spindle speed is 2000r / min, the grinding feed rate is 15μm / min, the workpiece speed is 200r / min, the flow rate of deionized water is 300ml / min, and the duration is 10min. Subsurface damaged layer. Then carry out precision grinding, the grinding wheel spindle speed is 1500r / min, the grinding feed speed is 5μm / min, the workpiece speed is 150r / min, the deionized water flow rate is ...
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