Substrate storage container and method for manufacturing the same

Abstract

A substrate storage container includes a container main body, first supporting parts and second supporting parts. The container main body includes a back wall and a pair of side walls in order to store a substrate between the side walls. The first supporting parts are opposingly disposed on each side wall in order to support a peripheral edge part of the substrate. The second supporting parts are opposingly disposed on each side wall in order to support the peripheral edge part of the substrate and positioned between the back wall and the first supporting parts. The first supporting parts and the second supporting parts are covered with a resin layer having a lower frictional property than that of the container main body.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a substrate storage container for storing various types of semiconductor wafers or substrates made of a photo-mask glass, a aluminum disc or the like. [0003] 2. Related Background of Art [0004] A conventional substrate storage containers, which is not shown in the drawings, includes a container main body in which a plurality of substrates including semiconductor wafers are arranged and stored, a lid member which can be freely attached and detached, and which opens and closes the front surface constituting the opening part of this container main body, and an anchoring mechanism which fastens the lid member that covers the front surface of the container main body. Such containers are utilized as precision substrate storage containers. A plurality of supporting parts are respectively disposed on the inside surfaces of both side walls of the container main body and have a shape bent alon...

AI Technical Summary

Benefits of technology

The present invention provides a substrate storage container that can prevent damage to semiconductor parts caused by shocks during loading and transportation. The container includes a container main body with side walls and first and second supporting parts for the peripheral edge part of the substrate. A resin layer with lower frictional properties than the container main body is used to cover the first and second supporting parts to prevent contamination and scratching of the substrates. The container also includes an elastic retainer for positioning the substrate and a cover opening and closing the container. The technical effects of the invention are to prevent damage to semiconductor parts, reduce the yield of products, and improve the efficiency of manufacturing.

Problems solved by technology

Conventional substrate storage containers are constructed as described above, and are therefore susceptible to shocks during loading and transport by means of truck, air freight, ship or the like.

When such containers are subjected to shocks, rubbing between the substrates and supporting parts causes damage to the substrates, and results in the generation of particulates that adhere to the surfaces of the substrates, so that they may cause significant problems such as a drop in the function and yield of products.

In particular, as the pitch of electronic circuits of semiconductor parts has become finer in recent years, contamination by particulates has become a serious problem.

Images