65 results about "Ultrasonic drilling" patented technology

Disclosed herein is a gas distribution plate for use in a gas distribution assembly for a processing chamber, where the gas distribution plate is fabricated from a solid yttrium oxide-comprising substrate, which may also include aluminum oxide. The gas distribution plate includes a plurality of through-holes, which are typically crescent-shaped. Through-holes which have been formed in the solid yttrium oxide-comprising substrate by ultrasonic drilling perform particularly well. The solid yttrium oxide-comprising substrate typically comprises at least 99.9% yttrium oxide, and has a density of at least 4.92 g / cm3, a water absorbency of about 0.02% or less, and an average grain size within the range of about 10 μm to about 25 μm. Also disclosed herein are methods for fabricating and cleaning the yttrium oxide-comprising gas distribution plate.

A borehole logging tool includes a housing oriented along a longitudinal axis, and a centralizer assembly that positions the housing substantially at the center of the borehole. In one example, the centralizer assembly includes a plurality of centralizer arms radially extendable outward from the longitudinal axis. The borehole logging tool further includes a scanning head that rotates a plurality of scanning sensors axially within the borehole about the longitudinal axis. The scanning head further includes a plurality of linkage arms coupled to the plurality of scanning sensors such that the scanning sensors are radially extendable outward from the longitudinal axis. The borehole logging tool further includes an extension assembly adapted to substantially concurrently control the radial extension of the centralizer arms and the plurality of sensors.

The invention relates to the machining field of drilling holes in hard and brittle materials, in particular to a laser and ultrasound combined type drilling system and a machining method thereof. According to the laser and ultrasound combined type drilling system, the hard and brittle materials can be protected, high-speed machining can be realized and locating can be accurate. The laser and ultrasound combined type drilling system mainly comprises a laser machining system, an ultrasonic machining system, a precision rotating and locating mechanism and an axis aligning system, wherein the laser machining system and the ultrasonic machining system are installed on the precision rotating and locating mechanism to regulate locating. The axis aligning system mainly comprises a locating panel, locking structures, a gravity center sensor, a distance sensor, an oriented adjusting structure, a movement adjusting base and a drive control device, and the locating panel is a thin supporting panel loading work-pieces to be machined. Through a combined drilling method, the hard and brittle work-pieces can be machined at high speed and high precision. The laser machining system and the ultrasonic machining system are adopted for combined machining procedures, and therefore pre-drilling can be carried out in advance, high-speed operation can be realized, the quality of the work-pieces can be protected, and the surface machining precision can be improved.