The invention provides a color film substrate. The color film substrate comprises a substrate body, a black matrix, a color film layer, a first planarization layer, a second planarization layer, a grating layer and a third planarization layer, wherein the black matrix is formed on the substrate body and comprises a plurality of openings and a bank part which surrounds the openings and forms a plurality of pixel areas, and the bank part comprises a black dye; the color film layer is formed in each opening and comprises a color quantum dot material layer formed in at least part of the opening regions; the first planarization layer covers the color film layer, and the bank part is exposed out of the first planarization layer; the second planarization layer covers the first planarization layerand the bank part, and the distance between the surface, relative to the surface of the first planarization layer and corresponding to the bank part, of the second planarization layer and the substrate body is smaller than the distance between the surface, corresponding to the pixel areas, of the second planarization layer and the substrate body; the grating layer is formed on the second planarization layer; the third planarization layer covers the grating layer. According to the substrate, the planarization layers with the high pixel areas and low black bank areas are formed so that nano-grating of the pixel areas can be well formed.