The invention discloses a junctionless
silicon nanowire transistor based on a bulk-
silicon material and a method for manufacturing the junctionless
silicon nanowire transistor. The junctionless silicon
nanowire transistor comprises a bulk-silicon substrate, a polycrystalline grid, a drain
electrode, a source
electrode and a grid
electrode, a P-type doped layer or an N-type doped layer is manufactured on the bulk-silicon substrate, an N-type doped layer or a P-type doped layer with a
doping type opposite to the first P-type doped layer or first the N-type doped layer is manufactured on the first P-type doped layer or the first N-type doped layer, and a PN junction is formed by the different types of doped
layers and realizes an electric
isolation effect; a source region, a drain region and a silicon nanowire are manufactured on the second N-type doped layer or the second P-type doped layer, and the source region and the drain region are connected with each other by the silicon nanowire to form conducting channels; an insulating
dielectric layer is manufactured on the surface of the integral silicon nanowire, the surface of the source region and the surface of the drain region; the polycrystalline grid is manufactured between the source region and the drain region and completely wraps the silicon nanowire; the drain electrode is manufactured on the drain region of silicon; the source electrode is manufactured on the source region of the silicon; and the grid electrode is manufactured on the polycrystalline grid. The junctionless silicon nanowire transistor and the method have the
advantage that the junctionless silicon nanowire transistor can be manufactured on the bulk-silicon substrate.