The invention discloses a
system and method for detecting surface defects of a large-
caliber spherical optical element. The
system comprises an XY two-dimensional guide rail, a two-dimensional rotating
system, a large-
caliber spherical optical element, an annular illuminating
light source, a Z-direction guide rail, a
microscope, a CCD1, an optical auto-collimating centering instrument and a CCD2, wherein the large-
caliber spherical optical element is fixedly arranged on the two-dimensional rotating system; the two-dimensional rotating system is arranged on the XY two-dimensional guide rail, so that multi-axis linkage of the large-caliber spherical optical element is realized; the CCD1 is connected to the
microscope and is fixedly arranged on the annular illuminating
light source; the annular illuminating
light source and the optical auto-collimating centering instrument are fixedly arranged on the Z-direction guide rail and are in
translational motion along with the Z-direction guide rail along the Z-axis direction; and the CCD2 is connected to the optical auto-collimating centering instrument. According to the invention, the subaperture sampling process of the surface defects of the large-caliber spherical optical element is realized, and full-caliber defect
gray level images are subjected to digital
feature extraction, so that automatic
quantitative determination of the defects is realized.