The invention discloses a device and a method for measuring the liquid level height of
molten silicon in a
single crystal furnace, belonging to the technical field of
semiconductor material detection. The device is characterized in that a
crucible is arranged in a
single crystal pulling furnace body; a conical heat insulation screen is arranged on the
crucible in the
single crystal pulling furnace body; an observation hole is formed in the top surface of the single
crystal pulling furnace body, and through the observation hole,
laser can enter the single
crystal pulling furnace body and a
photoelectric sensor can acquire an image; the
optical axis of a lens is set to be perpendicular to the projection of a
laser stripe on
silicon liquid, the sum d' of the distance between one reference point and the
laser stripe and the distance between the other reference point and the laser stripe is calculated, and the distance d between the lower edge of the heat insulation screen and the
silicon liquid is calculated according to a geometric relation. According to the device and the method, laser is adopted as reference of measurement, and the laser stripe can be processed to be narrower, so that the
measurement precision can be improved; the
measurement precision is higher due to adoption of
double reflection laser measurement; the laser incidence and the CCD (
charge coupled device) imaging are carried out in a same incident hole, the laser is fixed together with a CCD, and the device disclosed by the invention lowers complexity in comparison with a method in which laser enters the single
crystal pulling furnace body from a window and is received by the CCD from another window.