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31results about How to "Small change in impedance" patented technology

Lithium ion battery electrolyte for improving battery pole piece interface

The invention relates to the technical field of a lithium ion battery, in particular to a lithium ion battery electrolyte for improving a battery pole piece interface. The lithium ion battery electrolyte comprises a non-aqueous organic solvent, a lithium salt and an additive, wherein the non-aqueous organic solvent comprises at least one of carboxylic ester, halogenated carbonic ester, aromatic hydrocarbon and halogenated aromatics thereof, and the additive comprises at least one of a lithium salt additive, fluoro carbonic ester, fluoro-ether, phosphonitrile and derivatives thereof. Compared with the prior art, the lithium ion battery electrolyte has the advantages that the solvent and the additive are used in a combination way to generate a synergic effect, the electrolyte has a favorable negative electrode interface in a low-temperature and rapid charging / discharging environments, no lithium is precipitated, thus, the requirements of low-temperature charging and discharging, rapid charging and discharging and high compaction density of a negative electrode pole plate can be simultaneously met, and meanwhile, the potential risk caused by lithium precipitation during the charging of the battery is reduced.
Owner:DONGGUAN SHANSHAN BATTERY MATERIALS

Method for simulating continuous speed regulation of DC brushless motor

ActiveCN101098116ASmall change in impedanceStrong consistency of stepless speed regulationSingle motor speed/torque controlBrushless motorsControl theory
An analogue stepless speed modulation method of direct-current non-brush motor comprises that (1), initialization, (2), judging external input shift, (3), checking the voltage difference at two ends of a motor, (4), adjusting PWM output, (5), comparing the voltage difference at two ends of the motor with the external input voltage difference reference value at two ends, until the voltage different is adjusted to demand. The invention quantizes the rotation speed of motor, tests the motor rotation speed of preset shift and the voltage difference at two ends of the motor, to reduce the change step of rotation speed of the motor. And engaged with the sequential analogue-digit converter, the invention can effectively resolve the defects of prior speed modulation method which will cause rotation speed different at different conditions of the direct-current non-brush motor, with strong stepless speed modulation uniformity and low cost. The invention can be used for stepless speed modulation of direct-current non-brush motor used b various aerators, cooling fans and heat radiation fans.
Owner:BYD CO LTD

Portable electrocardio detection device based on artificial skin and electrocardio monitoring system

The invention discloses a portable electrocardio detection device based on artificial skin and an electrocardio monitoring system, and aims to improve detection precision and achieve good interferenceresistance on premise that the wearing comfort of a user is not affected. According to the electrocardio monitoring system, an electrocardio monitoring piece comprises one or more electronic epidermis units for acquiring electric signals generated along with activities of a heart; a monitoring circuit is connected with connection points of the one or more electronic epidermis units in the electrocardio monitoring piece, and is used for processing acquired electric signals to be adaptive to input into a control unit; the control unit is used for controlling operation of other units and used for acquiring electrocardio monitoring data according to the input electric signals; a data storage unit is used for storing acquired electrocardio monitoring data; a communication unit is used for communicating with an external terminal to transmit the electrocardio monitoring data and / or control instructions; the control unit, the monitoring circuit, the data storage unit and the communication unit are arranged on a flexible circuit board.
Owner:CHENGDU ROUDIAN YUNKE SCI & TECH CO LTD

Module structure for high-speed connector and high-speed connector

The invention discloses a module structure for a high-speed connector and a high-speed connector. The module structure comprises a signal transmission module and a shielding component disposed on thesignal transmission module, wherein the signal transmission module is provided therein with differential signal terminals at intervals; the differential signal terminals have differential pair pins; and the vertical distance A between the shielding component and the differential signal terminals in the signal transmission module and the center distance B of the differential pair pins satisfy: A<B / 8. By limiting the distance between the shielding component and a signal wire, the module structure ensures a low impedance change of the differential pairs as much as possible, thereby improving theperformance of the connector.
Owner:SICHUAN HUAFENG ENTERPRISE GRP

Distribution network simulation system

ActiveCN106251747AVersatileAccurate and reliable fault simulation resultsEducational modelsInteraction deviceDistribution grid
The invention provides a distribution network simulation system. The system comprises a simulation distribution network, a fault simulation device which is arranged in the distribution network to trigger a fault in the distribution network, section switches distributed in the distribution network to isolate the fault, a collecting device which is arranged in the distribution network to collect the voltage and current of each node of the distribution network, a control device which is connected with the fault simulation device, the section switches and the collecting device, a human-computer interaction device which is communicatively connected with the control device to set the fault of the distribution network, and a recorder which is arranged in the distribution network, is communicatively connected with the human-computer interaction device, and is used for recording the change of the electric quantity of the distribution network before and after the fault and feeding back the change to the human-computer interaction device. The distribution network simulation system provided by the invention can comprehensively and accurately simulate the dynamic behaviors of the distribution network under normal operation and fault condition, and is visual, broad, flexible and integral.
Owner:STATE GRID CORP OF CHINA +2

Power carrier communication system of cable shielding layer

InactiveCN102629882AStable structureThe influence of small electric loadPower distribution line transmissionCarrier signalConductor Coil
The invention discloses a power carrier communication system of a cable shielding layer, which comprises a plurality of power supply cable connectors, power supply cables, a plurality of cable shielding layer grounding wires, a plurality of inductive couplers, a plurality of power line carrier machines, and a plurality of data terminal equipment, wherein each power supply cable connector is in circuit connection with a cable inside a corresponding distribution substation; the power supply cables are in circuit connection between the power supply cable connectors, and the cable shielding layer is formed by the power supply cables and the a plurality of power supply cable connectors; the cable shielding layer grounding wires are in circuit connection with the corresponding power supply cable connectors; each inductive coupler comprises a primary side winding and a secondary side winding, one end of the primary side winding is earthed, and the other end of the primary side winding is in circuit connection with the corresponding cable shielding layer grounding wire; the power-line carrier machines are in circuit connection with the secondary side windings of the corresponding inductive couplers; and the data terminal equipment is in circuit connection with the power line carrier machines. According to the invention, by adopting the cable shielding layer to perform long-distance information transmission of medium-voltage carrier signals, the passage state is good, the attenuation is low and the impedance change is low.
Owner:SHANGHAI MUNICIPAL ELECTRIC POWER CO +1

Pneumatic type three-parameter Weibull low-frequency ultrasonic atomizing spray nozzle

The invention provides a pneumatic type three-parameter Weibull low-frequency ultrasonic atomizing spray nozzle. The overall vibrating direction of the spray nozzle is the axial direction. A three-parameter Weibull curve type amplitude change rod is adopted as an amplitude change rod of the three-parameter Weibull curve type low-frequency ultrasonic three-time atomizing spray nozzle. The size of metal used in the three-parameter Weibull curve type amplitude change rod is small, less heat is emitted, and the defects that amplitude rods of other shapes are large in metal size and emit much heatare overcome. According to the pneumatic type three-parameter Weibull low-frequency ultrasonic atomizing spray nozzle, by means of the high-pressure airflow effect of an air compressor on a wind inputpipeline, fog drops are subjected to atomizing of the third time on the right end face of a metal sheet. The defect that ultrathin fog drops cannot be generated easily through low-frequency ultrasonic atomizing is overcome, and the spray nozzle can be applied to the fields of atomizing cultivation, ultrasonic spraying and the like.
Owner:JIANGSU UNIV

Microwave oven

A microwave oven is adapted to radiating mutual reverse-phase wave to make wave guide tube impedance change reach to minimum in response to food loading variation, so then it can keep microwave outputting in constant value regardless of food loading quantity much or less, simultaneously it makes electric field in cavity to keep constant.
Owner:SAMSUNG ELECTRONICS CO LTD

Portable muscle fatigue degree detection equipment based on electronic epidermis

PendingCN106821378ASuppression of motion interferenceEasy to wear for a long timeInertial sensorsTelemetric patient monitoringHuman bodyFlexible circuits
The invention discloses portable muscle fatigue degree detection equipment based on electronic epidermis. The portable muscle fatigue degree detection equipment comprises the electronic epidermis, an amplifying and filtering circuit, a muscle fatigue degree detection main control circuit, a motion detection module and a Bluetooth data circuit, wherein the muscle fatigue degree detection main control circuit and the amplifying and filtering circuit are made of a flexible circuit board; the motion detection module is integrated on the flexible circuit board; the electronic epidermis has a snake-shaped inter-connected island-bridge structure, and is connected with the flexible circuit board; the amplifying and filtering circuit is used for filtering interference signals such as working frequency interference from human body electromyographic signals acquired by the electronic epidermis, and keeping 10-500Hz signals; meanwhile, the motion detection module is used for analyzing the acquired human body motion information; the muscle fatigue degree detection main control circuit is used for analyzing the electromyographic signals and the human body motion information; the human body motion information is transmitted to an upper computer through the Bluetooth data circuit to display the muscle fatigue degree and motion data. The portable muscle fatigue degree detection equipment is suitable for being popularized and applied in the fields of medical rehabilitation and sports and health.
Owner:CHENGDU ROUDIAN YUNKE SCI & TECH CO LTD

Digit controlled constant force feeding ultrasonic plug extruder

The invention discloses a digital-control constant-force feeding ultrasonic pusher. The invention has an ultrasonic pusher, a dynamic strain gage, an A / D converter, and a computer while they are connected. Wherein, the ultrasonic pusher has a servo-motor, a coupler, a ball lead-screw, a lead-screw sliding end, first muffle, a coupling sheath, a pressure sensor, first sheath pin, second muffle, second sheath pin, the cover of energy converter, a piezoelectricity energy converter, a variable-amplitude rod, and a throw-out knife, while they are connected. Wherein, the piezoelectricity energy converter is connected to the ultrasonic wave generator, and the coupling sheath is connected to the guide sheath and guide axle.
Owner:HANGZHOU DIANZI UNIV

Electronic apparatus having coplanar waveguide transmission line

An electronic apparatus having a coplanar waveguide transmission line configured to reduce impedance discontinuity in the coplanar waveguide transmission line is introduced. The electronic apparatus includes a coplanar waveguide transmission line including a substrate, at least one signal line and a plurality of reference planes, and the electronic apparatus includes at least one passive component. Each of the reference planes is coupled to a DC voltage. The at least one passive component is electrically connected between the reference planes and acts as a short circuit at relatively high frequencies.
Owner:NOVATEK MICROELECTRONICS CORP

Radio frequency coaxial connector

The invention relates to a radio frequency coaxial connector, which includes a radio frequency plug and a radio frequency socket. The radio frequency plug includes a tubular plug outer conductor. Multiple first conductor plates are arranged along the axis of the plug outer conductor inside the plug outer conductor. A second conductor plate is fixedly arranged at the central axis of the plug outer conductor. The radio frequency socket includes a tubular socket shell. First slots matching the first conductor plates are arranged at the front end of the socket shell. A tuning-fork-shaped socket inner conductor is arranged at the central axis of the socket shell. A second slot matching the second conductor plate is arranged at the head end of the socket inner conductor. An insulating sleeve fills the gap between the tail of the socket inner conductor and the inner wall of the socket shell. When the radio frequency plug is plugged into the radio frequency socket of the radio frequency coaxial connector, the plugging error is within 3mm, the impedance change is small, and the signal transmission is almost free from interference. The radio frequency coaxial connector has high fault tolerance, and is suitable for large-scale synchronous application.
Owner:SHANGHAI AEROSPACE SCI & IND ELECTRIC APPLIANCE RES INST

Heating device for electric vehicle and method for controlling same

A heating device for an electric vehicle, according to an embodiment of the present invention, comprises: a water pump which is for circulating supplied water; a heating resistor which has one or moresurface type heating elements formed by means of a heating paste composition and is for heating the circulated water; a water temperature sensor which is for measuring the temperature of the hot water heated by means of the heating resistor; and a control unit which is for adjusting the heating resistor such that the measured temperature measured by means of the water temperature sensor satisfiesa set temperature value, wherein the heating paste composition comprises, on the basis of 100 parts by weight of the total heating paste composition, 3-6 wt % of carbon nanotube particles, 0.5-30 wt% of carbon nanoparticles, 10-30 wt % of a mixed binder, 29-83 wt % of an organic solvent, and 0.5-5 wt % of a dispersant, wherein the mixed binder has epoxy acrylate, polyvinyl acetal and phenolic resin mixed therein or has hexamethylene diisocyanate, polyvinyl acetal and phenolic resin mixed therein.
Owner:大华合成技术株式会社

Elastic inner conductor of radio-frequency coaxial connector and processing method thereof

The invention discloses an elastic inner conductor of a radio-frequency coaxial connector and a processing method thereof. The elastic inner conductor comprises an elastic conductor, a conductor and apin shaft, wherein the elastic conductor is of a cylindrical structure, and a first accommodating cavity is arranged in the elastic conductor; the conductor and the elastic conductor are coaxially arranged, one end of the conductor is arranged in the first accommodating cavity of the elastic conductor in a sliding mode, the inner surface of the elastic conductor and the outer surface of the conductor are in contact with each other, and a second accommodating cavity is arranged in the conductor; one end of the pin shaft is fixed in the first accommodating cavity of the elastic conductor, and the other end of the pin shaft is movably arranged in the second accommodating cavity; a spring is arranged in the second accommodating cavity, one end of the spring is connected with the pin shaft, and the other end of the spring is connected with the conductor. The elastic inner conductor disclosed by the invention can solve the axial fit tolerance between the radio-frequency coaxial connector and a circuit board and has the advantages of stable performance, convenient production and processing and low cost.
Owner:SUZHOU RECODEAL INTERCONNECT SYST

Module structure for high-speed connector and high-speed connector

The invention discloses a module structure for a high-speed connector and a high-speed connector. The high-speed connector comprises a mounting base and a signal transmission module inserted into themounting base. The signal transmission module is composed of a plastic package casing and a differential signal terminal. The side surface of the plastic package case that is in contact with the mounting base is provided with a positioning hook and a wedge structure in the insertion direction. The positioning hook matches an insertion groove in the mounting base. The wedge structure matches a wedge-shaped groove on the end portion of the side wall of the mounting base. By disposing the wedge structure on the module structure, and by means of the cooperation of the wedge structure and the wedge-shaped groove, the positioning hook can enter the positioning insertion groove of the base according to a predetermined path, thereby improving the stability of the structure and ensuring the consistency of the differential impedance.
Owner:SICHUAN HUAFENG ENTERPRISE GRP

Radio frequency integrated socket, printed circuit board and terminal device

The invention relates to a radio frequency integrated socket, a printed circuit board and a terminal device, the radio frequency integrated socket comprises a coaxial seat gear and a radio frequency test seat gear, and the coaxial seat gear and the radio frequency test seat gear are arranged along the direction in which the radio frequency integrated socket is inserted into a radio frequency integrated plug; a concave structure is arranged on one side, deviating from the direction in which the radio frequency integrated socket is inserted into the radio frequency integrated plug, of the elastic component, the concave structure is concave towards the direction in which the radio frequency integrated plug is inserted into the radio frequency integrated socket, and the concave structure is electrically connected with a radio frequency signal bonding pad on the radio frequency integrated socket through the elastic component; the contact area between the radio frequency integrated plug andthe concave structure is smaller than the contact area between the radio frequency integrated plug and the concave structure when the elastic component is compressed to the radio frequency test seat gear. Through the technical scheme of the invention, the radio frequency integrated socket can be compatible with the functions of a coaxial seat and a radio frequency test seat.
Owner:MEIZU TECH CO LTD

Method for optimizing impedance discontinuity at high-speed link capacitor

The invention discloses a method for optimizing impedance discontinuity at a high-speed link capacitor. A high-speed link comprises a mainboard; the main board comprises a transmitting end, a capacitor and a receiving end; the emitting end is connected with the capacitor through an outgoing line L1 and a main wire L2 of the mainboard; and the capacitor is connected with the receiving end through aconnecting line L3. The method comprises the following steps of adding a transition region wire A1 between the main wire L2 and the capacitor, and adding a transition region wire A2 between the capacitor and the connecting line L3; adjusting the impedances of the transition region wires A1 and A2, and performing time domain reflectometer simulation for different impedances of the transition region wires A1 and A2; comparing impedance discontinuity conditions of the high-speed link under the different impedances of the transition region wires A1 and A2 according to a simulation result; and determining optimal impedance values of the transition region wires A1 and A2 according to a comparison result. According to the method disclosed by the invention, the transition region wires are added before and after the capacitor, and the influence of the transition region wires on the overall characteristics of the link under the condition of the different impedances is simulated to obtain the optimal impedance values of the transition region wires.
Owner:ZHENGZHOU YUNHAI INFORMATION TECH CO LTD

Digit controlled constant force feeding ultrasonic plug extruder

The invention discloses a digital-control constant-force feeding ultrasonic pusher. The invention has an ultrasonic pusher, a dynamic strain gage, an A / D converter, and a computer while they are connected. Wherein, the ultrasonic pusher has a servo-motor, a coupler, a ball lead-screw, a lead-screw sliding end, first muffle, a coupling sheath, a pressure sensor, first sheath pin, second muffle, second sheath pin, the cover of energy converter, a piezoelectricity energy converter, a variable-amplitude rod, and a throw-out knife, while they are connected. Wherein, the piezoelectricity energy converter is connected to the ultrasonic wave generator, and the coupling sheath is connected to the guide sheath and guide axle.
Owner:HANGZHOU DIANZI UNIV

Microwave oven

A microwave oven is adapted to radiating mutual reverse-phase wave to make wave guide tube impedance change reach to minimum in response to food loading variation, so then it can keep microwave outputting in constant value regardless of food loading quantity much or less, simultaneously it makes electric field in cavity to keep constant.
Owner:SAMSUNG ELECTRONICS CO LTD

A Method for Optimizing Impedance Discontinuities at High-Speed ​​Link Capacitance

The invention discloses a method for optimizing the impedance discontinuity at the capacitance of a high-speed link. The high-speed link includes a main board, and the main board includes a transmitting end, a capacitor and a receiving end; The wiring L2 is connected, and the capacitor is connected to the receiving end through the connecting line L3; the method includes the following steps: adding a transition zone wiring A1 between L2 and the capacitor, and adding a transition zone wiring A2 between the capacitor and L3; adjusting A1 and A2 impedance, and conduct time domain reflectometer simulation for the different impedances of A1 and A2; compare the impedance continuity of the high-speed link when comparing the different impedances of A1 and A2 according to the simulation results; determine the optimal impedance of A1 and A2 according to the comparison results value. In the method disclosed by the invention, the wiring in the transition zone is added before and after the capacitor, and the optimal value of the impedance of the wiring in the transition zone is obtained by simulating the influence of the wiring in the transition zone on the overall characteristics of the link under different impedance conditions.
Owner:ZHENGZHOU YUNHAI INFORMATION TECH CO LTD

Circuit board

PendingCN114205994ASmall change in impedanceSolve the problem of impedance discontinuityHigh frequency circuit adaptationsLine widthHemt circuits
The invention relates to a circuit board, and the circuit board comprises at least one first circuit layer and at least one second circuit layer, the first circuit layer and the second circuit layer are arranged at an interval in the vertical direction, and the first circuit layer is provided with a gradual change signal line; the second circuit layer comprises a hollow area, and the position of the hollow area corresponds to the position of the gradual change signal line on the adjacent first circuit layer. Since the hollow area is hollowed according to the routing mode of the gradually-changed signal line on the first circuit layer, the thickness of the medium is increased, so that a thicker line width can be designed on the first circuit layer, and the purpose of reducing signal loss is achieved. Correspondingly, the impedance change of the area where the gradual change line signal is located can be minimized by optimizing the hollow area, so that the problem of discontinuous impedance of the gradual change line area is solved, and the quality of signal transmission on the circuit board is further improved.
Owner:中科可控信息产业有限公司

Method for simulating continuous speed regulation of DC brushless motor

ActiveCN101098116BSmall change in impedanceStrong consistency of stepless speed regulationSingle motor speed/torque controlBrushless motorsControl theory
An analogue stepless speed modulation method of direct-current non-brush motor comprises that (1), initialization, (2), judging external input shift, (3), checking the voltage difference at two ends of a motor, (4), adjusting PWM output, (5), comparing the voltage difference at two ends of the motor with the external input voltage difference reference value at two ends, until the voltage differentis adjusted to demand. The invention quantizes the rotation speed of motor, tests the motor rotation speed of preset shift and the voltage difference at two ends of the motor, to reduce the change step of rotation speed of the motor. And engaged with the sequential analogue-digit converter, the invention can effectively resolve the defects of prior speed modulation method which will cause rotation speed different at different conditions of the direct-current non-brush motor, with strong stepless speed modulation uniformity and low cost. The invention can be used for stepless speed modulationof direct-current non-brush motor used b various aerators, cooling fans and heat radiation fans.
Owner:BYD CO LTD

Transition block and optical chip packaging base

The invention discloses a transition block and an optical chip packaging base, and the transition block comprises a block body made of a SiC material, wherein the front surface of the block body is provided with a signal return path and a microstrip line, the two sides of the block body are respectively provided with a metalized fixing groove, and the back surface of the block body is a gold-tin back surface. The method has the advantages of high efficiency, high compatibility, good coupling, reliable quality, high yield and low cost. The method is applied to the technical field of 5G.
Owner:SHENZHEN ZHONGXING SINDI TECH CO LTD

Broadband Semi-elliptical Slot Antenna Array and Design Method in Millimeter Wave Antenna Level Package

Broadband coplanar waveguide semi-elliptical slot antenna array structure in millimeter-wave antenna-level packaging, related to the field of antenna array technology, how to design an antenna array with large array bandwidth, high gain, and easy integration suitable for narrow, long and straight scenarios; including antennas An array radiation component, an antenna array feed component, and a transition structure from GCPW to CPW; the antenna array feed component excites the corresponding antenna unit through the GCPW to CPW transition structure and a rectangular CPW feeder; the antenna unit includes a first metal connection on the upper surface of the microwave dielectric substrate The etched semi-elliptical gap of the floor and the open fan-shaped branch, the semi-elliptical gap is the gap etched between the fan-shaped outer edge of the fan-shaped branch and the first metal grounding plate, and the midpoint of the chord corresponding to the fan-shaped arc of the open-circuit fan-shaped branch to the surrounding second The distance of a metal grounding plate changes gradually according to a semi-elliptical shape. Compared with the traditional circular and elliptical slot structures, the slot width is shortened, the array radiation effect is improved, and the array bandwidth and gain are larger.
Owner:ANHUI UNIVERSITY

Broadband microwave panel slot antenna

The invention relates to a broadband microwave panel slot antenna which comprises a substrate (10), a radiation pole (20) and a feed network (30), the radiation pole (20) is arranged on one surface of the substrate (10), and the feed network (30) is arranged on the other surface of the substrate (10); the radiation pole (20) comprises a rectangular feeder line (21), a fan-shaped branch knot (22) and a semi-elliptical gap (23), the rectangular feeder line (21) is communicated with the fan-shaped branch knot (22), and the semi-elliptical gap (23) is arranged on the periphery of the rectangular feeder line (21) and the fan-shaped branch knot (22) to form a closed cavity; the feed network (30) forms a closed ring, and the feed network (30) covers the radiation pole (20) along the width direction of the substrate (10). According to the slot antenna provided by the invention, the rectangular feeder line, the semi-elliptical slot and the fan-shaped branch knot are arranged in a combined manner, and the interval of the slots is gradually changed, so that the impedance change of the antenna is very small, the antenna resonance effect in a broadband range is realized, and the slot antenna has a relatively good bandwidth characteristic and can meet the high-speed and high-resolution requirements of communication equipment and detection equipment.
Owner:西安三维通信有限责任公司

Fault detection method, device, system and equipment for filter capacitor

The invention relates to a fault detection method, device, system and equipment for a filter capacitor. The fault detection method of the filter capacitor includes the steps of: obtaining the phase voltage and the phase current of the three-phase filter capacitor; according to the phase voltage and the phase current, calculating the positive sequence phase voltage and the negative sequence phase voltage corresponding to the phase voltage by extracting the symmetrical component method, and The positive-sequence phase current and negative-sequence phase current corresponding to the phase current; according to the positive-sequence phase voltage, negative-sequence phase voltage, positive-sequence phase current and negative-sequence phase current, the equivalent Conductance; determine the fault state of the three-phase filter capacitor based on the equivalent conductance. Through impedance asymmetry detection based on phase voltage and phase current data of three-phase filter capacitors, equivalent conductance can be determined to detect extremely small line current changes, so that extremely small impedance changes can be detected to accurately sense three-phase filtering Whether the capacitor is faulty.
Owner:CHINA SHENHUA ENERGY CO LTD

Microwave oven

A microwave oven is suitable to radiate different-phase microwaves to make the impedence variation of wave guide tube is minimal when it is in response to the variation of food load, so the microwave value is constant no matter how much the food load, and the electric field is constantly distributed in the cavity.
Owner:SAMSUNG ELECTRONICS CO LTD

Impedance matching method and semiconductor process equipment

PendingCN113066712ASmall change in impedanceReduce the probability of extinctionElectric discharge tubesCapacitanceProcess equipment
The invention provides an impedance matching method of semiconductor process equipment, which comprises the following steps: a capacitance value determination stage: detecting stable capacitance values of a plurality of capacitors in a matcher after build-up of luminance occurs in a process chamber and the matcher completes automatic matching; a matching stage: the capacitance value of one capacitor in the matcher is adjusted to be the corresponding luminance build-up capacitance value, the capacitance values of the other multiple capacitors are adjusted to be the corresponding stable capacitance values, and the luminance build-up capacitance value of the capacitor is smaller than the stable capacitance value of the capacitor; and the power supply is started, and the capacitance value of a capacitor from the build-up capacitance value is adjusted to the stable capacitance value of the capacitor. According to the impedance matching method provided by the invention, rapid and stable build-up of luminance can be realized, the matching time of the matcher is shortened, and the consistency of process results is improved. The invention also provides semiconductor process equipment.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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