A method of fabricating a
thin film transistor substrate for reducing a
mask process and, at the same time removing a transparent
electrode ITO which remains at a non-display area by a
contact hole filling process is disclosed. In the method of fabricating the
thin film transistor substrate having a display area and a non-display area where is located at the exterior of the display area, a gate pattern, which is comprised of a gate line which is formed at a display area, a gate
electrode which is connected to a gate line, a gate link which is formed at a non-display area, and a lower gate pad
electrode which is connected, via a gate link, to a gate line, is formed. A gate insulating film is formed on a substrate provided with a gate pattern, and then a data pattern, which is comprised of a data line which is formed at a display area and is crossed with a gate line, a source electrode and a drain electrode which are connected to a data line, a
data link which is formed at a non-display area, and a lower data pad electrode which is connected, via a
data link, to a data line, is formed. And a protective film is formed on an entire substrate provided with a data pattern, and then a conductive pattern, which is comprised of a pixel electrode which is formed at a display area by a
contact hole filling process using a
smoothing material, and a lower gate pad electrode and a lower data pad electrode which are formed at a non-display area, is formed.