The invention belongs to the technical field of
film material preparation and particularly relates to a device and method for preparing a combined
film material warehouse. The device disclosed by the invention is composed of a combined pulse
laser coating machine, a
laser, a computer, a compound molecular pump and a double-stage
rotary vane pump, wherein the combined pulse
laser coating machine is composed of an RHEED (Reflection High-Energy
Electron Diffraction) electronic gun, a pre-pumping pipeline, a stepping motor, a target selection swing mechanism, an RHEED fluorescent screen, a CCD (
Charge Coupled Device)
image sensor, a laser window, a substrate frame, a
mask frame, a
servo motor and a
vacuum chamber, wherein the target selection swing mechanism is used for controlling target switching. A method provided by the invention comprises the steps of designing a
mask with a corresponding structure according to a deposition film, and precisely and controllably depositing a multi-element component film warehouse through the combined pulse
laser coating machine. The device disclosed by the invention is simple and convenient to operate, modularized in structure, convenient to maintain, capable of filling up the blank of the device for depositing the
film material warehouse at high
controllability at present and providing a novel feasible method for preparing the film material warehouse and wide in application prospect.